POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

    公开(公告)号:US20190390919A1

    公开(公告)日:2019-12-26

    申请号:US16539848

    申请日:2019-08-13

    Abstract: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

    公开(公告)号:US20220155025A1

    公开(公告)日:2022-05-19

    申请号:US17592490

    申请日:2022-02-03

    Abstract: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
    4.
    发明申请
    POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE 有权
    基于聚合物的微波热处理平面

    公开(公告)号:US20160161193A1

    公开(公告)日:2016-06-09

    申请号:US14925787

    申请日:2015-10-28

    Abstract: Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

    Abstract translation: 本文描述的实施例涉及基于聚合物的热接地平面的概念和设计。 根据一个实施例,使用聚合物作为制造热接地平面的材料。 其他实施方案包括使用两个微柱阵列的优化芯吸结构设计,使用铜/聚合物处理的TGP的基于光刻的微加工,微柱,嵌入微柱中的节流释放孔,原子层沉积(ALD)亲水 涂层,节流流体充填结构和密封方法,无缺陷ALD气密涂层,符合结构设计。

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