公开(公告)号：AU7130800A

公开(公告)日：2001-04-17

申请号：AU7130800

申请日：2000-09-13

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  GROVES JAMES ,  CARDARELLI DONATO ,  CARROLL RAYMOND ,  DAUWALTER CHARLES R

IPC: G01C19/56 ,  H01L29/84 ,  G01P9/04

Abstract: An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.

公开(公告)号：AT476638T

公开(公告)日：2010-08-15

申请号：AT00960094

申请日：2000-09-13

Applicant: KIONIX INC ,  MILLISENSOR SYSTEMS AND ACTUAT

Inventor： ADAMS SCOTT ,  GROVES JAMES ,  CARDARELLI DONATO ,  CARROLL RAYMOND ,  DAUWALTER CHARLES

IPC: G01C19/56 ,  H01L29/84

Abstract: An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.

公开(公告)号：DE60044782D1

公开(公告)日：2010-09-16

申请号：DE60044782

申请日：2000-09-13

Applicant: KIONIX INC ,  MILLISENSOR SYSTEMS AND ACTUAT

Inventor： ADAMS SCOTT G ,  GROVES JAMES ,  CARDARELLI DONATO ,  CARROLL RAYMOND ,  DAUWALTER CHARLES R

IPC: G01C19/56 ,  H01L29/84