公开(公告)号：JP2006234838A

公开(公告)日：2006-09-07

申请号：JP2006127976

申请日：2006-05-01

Applicant: Advion Biosciences Inc ,  Kionix Inc ,  アドヴィオン バイオサイエンシィズ インコーポレイテッド ,  キオニックス インコーポレイテッド

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

CPC classification number: G01N30/6095 ,  G01N30/7266 ,  G01N2030/6013 ,  H01J49/0018 ,  H01J49/167 ,  Y10T436/24 ,  Y10T436/2575

Abstract: PROBLEM TO BE SOLVED: To provide a chemical analytical system of large capacity easy to be reproduced and allowing mass production. SOLUTION: The chemical analytical system includes the first substrate having a main face, the second substrate joined or attached thereto, a liquid chromatography system integrated thereto, and constituted to receive and treat an analytical liquid to be discharged, and a monolithic electrospray device having an inlet orifice located in a injection side, a nozzle located on a discharge face opposite to the injection side, a channel extended penetrated continuously through a monolithic device, and communicated with the inlet orifice and the nozzle, and an area recessed from the discharge face to surround the nozzle. The monolithic device is integrated on the first substrate, the injection side is constituted to receive the treated liquid from the liquid chromatography system, and the main face is constituted to distribute the liquid by electrospraying the liquid. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供容易复制的大容量化学分析系统，并允许批量生产。 解决方案：化学分析系统包括具有主面，第二基板接合或附着的第一基板，与其一体化的液相色谱系统，构成为接收和处理要排出的分析液，以及单片电喷雾 装置，其具有位于注射侧的入口孔，位于与注射侧相对的排出面上的喷嘴，延伸穿过单片装置连续穿过并与入口孔和喷嘴连通的区域， 排出面以围绕喷嘴。 该单片装置集成在第一基板上，注射侧构成为从液相色谱系统接收经处理的液体，并且主面构成为通过电喷雾液体来分配液体。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006234837A

公开(公告)日：2006-09-07

申请号：JP2006127975

申请日：2006-05-01

Applicant: Advion Biosciences Inc ,  Kionix Inc ,  アドヴィオン バイオサイエンシィズ インコーポレイテッド ,  キオニックス インコーポレイテッド

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  G01N30/60 ,  B01D15/08 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

CPC classification number: G01N30/6095 ,  G01N30/7266 ,  G01N2030/6013 ,  H01J49/0018 ,  H01J49/167 ,  Y10T436/24 ,  Y10T436/2575

Abstract: PROBLEM TO BE SOLVED: To provide a separator and a system for chemical separation of large capacity easy to be reproduced and allowing mass production. SOLUTION: The chemical separator includes a substrate for forming a channel, a plurality of columnar bodies worked of the substrate and extended from the channel, an electric insulation layer provided on a surface of the substrate, and an immobilization phase joined to the columnar bodies reacting with an analyzed sample introduced into the channel for the separation, and the analyzed sample is electrically insulated from the substrate. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供容易再现并允许批量生产的大容量化学分离分离器和系统。 解决方案：化学分离器包括用于形成通道的基板，从基板加工并从通道延伸的多个柱状体，设置在基板的表面上的电绝缘层，以及与基板接合的固定相 柱状体与引入通道的分析样品反应以进行分离，并且分析的样品与基底电绝缘。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：CA2343055C

公开(公告)日：2011-07-12

申请号：CA2343055

申请日：1999-09-01

Applicant: ADVANCED BIOANALYTICAL SERVICES INC ,  KIONIX INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  G01N30/72 ,  B01D15/08 ,  B01D15/14 ,  B05B5/00 ,  G01N30/60 ,  G01N37/00 ,  H01J49/04

Abstract: An electrospray device (100), a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device (100) includes a substrate (102) defining a channel (104) between an entrance orifice (106) on an injection surface (108) and an exit orifice on an ejection surface (112), a nozzle (110) defined by a portion recessed (114) from the ejection surface (112) surrounding the exit orifice, and an electrode for application of an electric potential to the substrate (102) to optimize and generate an electrospray. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice (106) of the electrospray device (100) to form an integrated single system.

公开(公告)号：AU2003216254A1

公开(公告)日：2003-09-04

申请号：AU2003216254

申请日：2003-02-12

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  YOUNG LINCOLN C

IPC: B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  G01N30/60

Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

公开(公告)号：AU2003216254A8

公开(公告)日：2003-09-04

申请号：AU2003216254

申请日：2003-02-12

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  YOUNG LINCOLN C

IPC: B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  G01N30/60

Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

公开(公告)号：CA2374666A1

公开(公告)日：2000-12-21

申请号：CA2374666

申请日：2000-06-14

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  DAVIS TIMOTHY J ,  SHAW KEVIN A ,  GALVIN GREGORY J ,  WILSON SHARLENE A ,  WALDROP PAUL C

IPC: G01N37/00 ,  B01D15/08 ,  B05B5/00 ,  B81B1/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/3065

Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence th at may be integrated in a full process. The first aspect, designated as "latent masking", defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The laten oxide pattern is then used to mask an etch. The second aspect, designated as "simultaneous multi-level etching (SMILE)", provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as "delayed LOCOS", provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequen ce that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricatean ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

公开(公告)号：AU5800499A

公开(公告)日：2000-04-03

申请号：AU5800499

申请日：1999-09-01

Applicant: ADVANCED BIOANALYTICAL SERVICES INC ,  KIONIX INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：US6432311B2

公开(公告)日：2002-08-13

申请号：US74577900

申请日：2000-12-21

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J

IPC: G01N30/60 ,  G01N30/72 ,  H01J49/10 ,  B01D15/08

CPC classification number: G01N30/7266 ,  G01N30/6095 ,  H01J49/0018 ,  H01J49/167 ,  Y10T29/49002 ,  Y10T436/25375 ,  Y10T436/255

Abstract: An electrospray device, a liquid chromatography device and an electrosprayliquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may -be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

Abstract translation: 公开了电喷雾装置，液相色谱装置和电喷雾液相色谱系统。 电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电 对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。 所述液相色谱装置包括分隔衬底，所述分离衬底限定入口孔和贮存器之间的引入通道以及所述储存器和出口孔之间的分离通道，所述分离通道具有垂直于所述流体流动的分离柱; 覆盖基板，其结合到分离基板以封闭储存器和与盖基板相邻的分离通道; 和可选地用于向流体施加电势的电极。 液相色谱装置的出口可以与电喷雾装置的入口孔均匀地接合，以形成一个集成的单一系统。 多个系统的阵列可以制造在单个单片芯片中，用于快速顺序流体处理和产生用于后续分析的电喷雾，例如通过将电喷雾装置的出口孔定位在质谱仪的采样孔附近。

公开(公告)号：HK1105910A1

公开(公告)日：2008-02-29

申请号：HK07111306

申请日：2004-12-09

Applicant: KIONIX INC ,  ADVION BIOSYSTEMS INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  B01D20100101 ,  B01D15/08 ,  G01N20100101 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：AU5612100A

公开(公告)日：2001-01-02

申请号：AU5612100

申请日：2000-06-14

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  SHAW KEVIN A ,  WALDROP PAUL C ,  WILSON SHARLENE A

IPC: G01N37/00 ,  B01D15/08 ,  B05B5/00 ,  B81B1/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/3065

Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as "latent masking", defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as " simultaneous multi- level etching (SMILE)", provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as "delayed LOCOS", provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.