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公开(公告)号：AU2003216254A1
公开(公告)日：2003-09-04
申请号：AU2003216254
申请日：2003-02-12
Applicant: KIONIX INC
Inventor： MOON JAMES E , YOUNG LINCOLN C
Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.
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公开(公告)号：AU2003234566A1
公开(公告)日：2003-12-22
申请号：AU2003234566
申请日：2003-05-13
Applicant: KIONIX INC
Inventor： ZHOU PENG , PINNISI MICHAEL D , MARUSAK RONALD E , MOON JAMES E , YOUNG LINCOLN C
IPC: B01D11/04 , B01F5/00 , B01F13/00 , B01J19/00 , B01L3/00 , G01N1/34 , G01N30/00 , G01N30/38 , G01N30/40 , G01N30/42 , G01N30/52 , G01N30/60
Abstract: Devices for performing liquid extraction of one or more constituents from one fluid to another fluid are provided. In operation, the fluids are separated by channel structures that stabilize the interfacial boundary between the fluids allowing, for example, countercurrent flow and exchange or other flow conditions incompatible with unassisted maintenance of laminar flow. Also provided are channel structures which aid in mixing the fluids. Thin membranes may be formed using liquid extraction devices according to the invention. A process for manufacturing such devices using DRIE is described.
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公开(公告)号：AU2003216254A8
公开(公告)日：2003-09-04
申请号：AU2003216254
申请日：2003-02-12
Applicant: KIONIX INC
Inventor： MOON JAMES E , YOUNG LINCOLN C
Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.
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公开(公告)号：EP1706467A4
公开(公告)日：2007-09-26
申请号：EP04795012
申请日：2004-10-13
Applicant: KIONIX INC
Inventor： ZHOU PENG , YOUNG LINCOLN C
CPC classification number: B29C66/54 , B01L3/502707 , B01L2200/0689 , B01L2200/12 , B01L2300/0816 , B01L2300/0887 , B29C65/4815 , B29C65/483 , B29C65/4895 , B29C66/543 , B29C66/71 , B29L2031/756 , B29K2069/00 , B29K2033/08 , B29K2025/06
Abstract: A method for making a polymeric microfluidic structure in which two or more components (layers) of the microfluidic structure are fixedly bonded or laminated with a weak solvent bonding agent, particularly acetonitrile or a mixture of acetonitrile and alcohol. In an aspect, acetonitrile can be used as a weak solvent bonding agent to enclose a microstructure fabricated in or on a non-elastomeric polymer such as polystyrene, polycarbonate, acrylic or other linear polymer to form a three-dimensional microfluidic network. The method involves the steps of wetting at least one of the opposing surfaces of the polymeric substrate components with the weak solvent bonding agent in a given, lower temperature range, adjacently contacting the opposing surfaces, and thermally activating the bonding agent at a higher temperature than the lower temperature range for a given period of time. The contacted polymeric substrates may also be aligned prior to thermal activation and compressed during thermal activation. A laminated, polymeric microfluidic structure is also disclosed.
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