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公开(公告)号：HK1098193A1
公开(公告)日：2007-07-13
申请号：HK07104400
申请日：2007-04-25
Applicant: KIONIX INC
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P J , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
Abstract: An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
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公开(公告)号：CA2540273C
公开(公告)日：2012-07-03
申请号：CA2540273
申请日：2004-09-20
Applicant: KIONIX INC
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
IPC: G01C19/5747 , B81C1/00 , G01C19/56 , G01P9/04
Abstract: An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
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Patent Agency Ranking
公开(公告)号：CA2540273A1
公开(公告)日：2005-04-07
申请号：CA2540273
申请日：2004-09-20
Applicant: KIONIX INC
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NISTOR VASILE , STIRLING NATHAN L , NENADIC NENAD
Abstract: An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
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公开(公告)号：WO2014137367A3
公开(公告)日：2015-06-25
申请号：PCT/US2013042886
申请日：2013-05-28
Applicant: KIONIX INC
Inventor： STIRLING NATHAN L , DEWALT LUKE E , STRAIT JAMES E , ADAMS SCOTT G
IPC: G01C25/00
CPC classification number: B81C99/005
Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with, multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.
Abstract translation: 提供了用于校准被测器件的校准单元，系统和方法。 校准单元，系统和方法使用单轴旋转单元在测试头上校准被测设备。 单轴旋转单元构造成从已知轴线以一定角度延伸。 测试头可以设计成具有多边形的截头锥体的形状。 校准单元，系统和方法可以使用重力激励，亥姆霍兹线圈激励和旋转速率激励的组合来校准被测器件。 校准单元，系统和方法可以自由地校准3度或更高的MEMS器件。
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5.发明申请
公开(公告)号：WO2005040715A3
公开(公告)日：2005-12-01
申请号：PCT/US2004030612
申请日：2004-09-20
Applicant: KIONIX INC , CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
CPC classification number: G01C19/5719
Abstract: An oscillatory angular rate MEMS sensor is described for sensing rotation about the "Z-axis". Embodiments are either coupled-mass tuning-fork or single oscillating-mass in nature. The sensor includes mechanical and electrical function integration, and is preferably manufactured by a unique MEMS fabrication process.
Abstract translation: 描述了用于感测围绕“Z轴”的旋转的振荡角速率MEMS传感器。 实施例是耦合质量音叉或单个振荡质量。 传感器包括机械和电气功能集成，并且优选地通过独特的MEMS制造工艺制造。
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公开(公告)号：WO2005031257A3
公开(公告)日：2006-03-02
申请号：PCT/US2004030614
申请日：2004-09-20
Applicant: KIONIX INC , CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
CPC classification number: G01C19/5747 , G01C19/5719
Abstract: An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
Abstract translation: 描述了用于感测绕“z轴”旋转的振荡速率传感器。 音叉是本质上具有结构连接和动力学的音叉，使得两个防爆质量的基本反相振荡是通过机械连杆实现的。
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公开(公告)号：EP1671135A4
公开(公告)日：2011-11-09
申请号：EP04784469
申请日：2004-09-20
Applicant: KIONIX INC
Inventor： CHOJNACKI ERIC P , SHEN-EPSTEIN JUNE P , NENADIC NENAD , STIRLING NATHAN L , NISTOR VASILE
CPC classification number: G01C19/5747 , G01C19/5719
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