Patent search ap:("KLA - TENCOR CORP") AND inv:"VAJARIA HIMANSHU" Page 1

1.

发明公开
AUTOMATED INLINE INSPECTION AND METROLOGY USING SHADOW-GRAM IMAGES 审中-公开
Title translation: AUTOMATISIERTE在线检测仪UND METROLOGIE MIT SHADOWGRAM-BILDERN

公开(公告)号：EP3111468A4

公开(公告)日：2017-08-09

申请号：EP15755638

申请日：2015-02-25

Applicant: KLA - TENCOR CORP

Inventor： VAJARIA HIMANSHU , JAHANBIN SINA , RIES BRADLEY , MAHADEVAN MOHAN

IPC: H01L21/66 , G06T7/00

CPC classification number: G06T7/0004 , G01N21/9503 , G06K9/481 , G06K9/6204 , G06K2209/19 , G06T7/0006 , G06T7/13 , G06T7/62 , G06T2207/10024 , G06T2207/30148

2.

发明公开
WAFER AND LOT BASED HIERARCHICAL METHOD COMBINING CUSTOMIZED METRICS WITH A GLOBAL CLASSIFICATION METHODOLOGY TO MONITOR PROCESS TOOL CONDITION AT EXTREMELY HIGH THROUGHPUT 审中-公开

公开(公告)号：EP3105780A4

公开(公告)日：2017-10-11

申请号：EP15748438

申请日：2015-02-12

Applicant: KLA - TENCOR CORP

Inventor： VAJARIA HIMANSHU , TORELLI TOMMASO , RIES BRADLEY , MAHADEVAN MOHAN

IPC: H01L21/66 , G06T7/00

CPC classification number: G06T7/0004 , G06T2207/20076 , G06T2207/30148 , H01L22/12 , H01L22/20 , Y02P90/14

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