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公开(公告)号：EP0532927A2
公开(公告)日：1993-03-24
申请号：EP92114182.6
申请日：1992-08-20
Applicant: KLA INSTRUMENTS CORPORATION
Inventor： Whil,Mark Joseph , Fu,Tao-Yi
CPC classification number: G01N21/95607 , G01N2021/558 , G01N2021/8861 , G01N2021/95615 , G01N2021/95676 , G01N2201/106
Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.
Abstract translation: 一种自动化光掩模检查装置，包括用于在XY平面中的蛇形路径中传送被测试的基板的XY状态（12），包括激光器（30），透射光检测器（34）的光学系统（16） ，反射光检测器（36），限定参考光束路径的光学元件和激光器，衬底和检测器之间的照明光束路径，以及用于相对于照射和参考光束往复扫描照射和参考光束的声光束扫描器（40,42） 基板表面，以及用于控制台和光学系统的操作以及用于解释和存储由检测器输出的信号的电子控制，分析和显示系统。 该设备可以以管芯到管芯的比较模式或管芯到数据库模式工作。
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公开(公告)号：EP0532927B1
公开(公告)日：1996-02-21
申请号：EP92114182.6
申请日：1992-08-20
Applicant: KLA INSTRUMENTS CORPORATION
Inventor： Whil,Mark Joseph , Fu,Tao-Yi
CPC classification number: G01N21/95607 , G01N2021/558 , G01N2021/8861 , G01N2021/95615 , G01N2021/95676 , G01N2201/106
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公开(公告)号：EP0532927A3
公开(公告)日：1993-07-28
申请号：EP92114182.6
申请日：1992-08-20
Applicant: KLA INSTRUMENTS CORPORATION
Inventor： Whil,Mark Joseph , Fu,Tao-Yi
CPC classification number: G01N21/95607 , G01N2021/558 , G01N2021/8861 , G01N2021/95615 , G01N2021/95676 , G01N2201/106
Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.
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