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公开(公告)号：SG11201707200PA
公开(公告)日：2017-10-30
申请号：SG11201707200P
申请日：2015-08-19
Applicant: KLA TENCOR CORP
Inventor： HERMANS LAURENT , DELFOSSE ERIC , NIJS FRANS , THISSEN FRANCIS , DE GREEVE JOHAN
Abstract: A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
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