公开(公告)号：WO03001146A9

公开(公告)日：2004-05-06

申请号：PCT/US0220017

申请日：2002-06-21

Applicant: KLA TENCOR CORP

Inventor： GUAN YU ,  FU HONG ,  LANGE STEVEN R

IPC: G01B11/06 ,  G01J3/10 ,  G01J3/46

CPC classification number: G01J3/10 ,  G01B11/0625 ,  G01J3/46

Abstract: Disclosed are methods and apparatus for designing an optical spectrum of an illumination light beam within an optical inspection system. A set of conditions for inspecting a film on a sample by directing an illumination light beam at the sample is determined. At least a portion of the illumination light beam is reflected off the sample and used to generate an image of at least a portion of the film on the sample. A plurality of peak wavelength values are determined for the optical spectrum of the illumination light beam so as to control color variation in the image of the film portion. The determination of the peak wavelengths is based on the determined set of conditions and a selected thickness range of the film. In one specific embodiment, the color variation is reduced, while in another embodiment the color variation is increased to enhance pattern contrast. An apparatus which implements the designed optical spectrum is also disclosed.

Abstract translation: 公开了用于设计光学检查系统内的照明光束的光谱的方法和装置。 确定通过在样品上引导照明光束来检查样品上的胶片的一组条件。 照明光束的至少一部分从样品反射并用于产生样品上的膜的至少一部分的图像。 针对照明光束的光谱确定多个峰值波长值，以便控制胶片部分的图像中的颜色变化。 峰值波长的确定基于所确定的条件集合和膜的选定厚度范围。 在一个具体实施例中，颜色变化减小，而在另一实施例中，颜色变化增加以增强图案对比度。 还公开了一种实现设计的光谱的装置。