公开(公告)号：PH12021550169A1

公开(公告)日：2021-10-11

申请号：PH12021550169

申请日：2021-01-22

Applicant: KLA TENCOR CORP

Inventor： WOUTERS CHRISTOPHE ,  JORIS KRISTOF ,  DE GREEVE JOHAN

IPC: G01B11/24 ,  G01B11/02 ,  G02B7/02 ,  G02B21/00 ,  G02B27/00

Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.

公开(公告)号：SG11202100316UA

公开(公告)日：2021-02-25

申请号：SG11202100316U

申请日：2019-07-23

Applicant: KLA TENCOR CORP

Inventor： WOUTERS CHRISTOPHE ,  JORIS KRISTOF ,  DE GREEVE JOHAN

IPC: G01B11/24 ,  G01B11/02 ,  G02B7/02 ,  G02B21/00 ,  G02B27/00

Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.