公开(公告)号：WO2012015819A3

公开(公告)日：2012-07-05

申请号：PCT/US2011045366

申请日：2011-07-26

Applicant: KLA TENCOR CORP ,  ZHANG SHIYU ,  WANG CHARLES N ,  CHURIN YEVGENIY ,  MOON YONG-MO ,  YANG HYOSEOK DANIEL ,  WANG MARK S

Inventor： ZHANG SHIYU ,  WANG CHARLES N ,  CHURIN YEVGENIY ,  MOON YONG-MO ,  YANG HYOSEOK DANIEL ,  WANG MARK S

IPC: H01L21/66

CPC classification number: G01N21/8806 ,  G01N21/9501

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source (402, or 412, or 502, or 802) emitting a light beam, a first reflective surface (404, or 414, or 504, or 804), and a second reflective surface (406, or 416, or 506, or 806). The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The virtual focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及倾斜照明器。 倾斜照明器包括发射光束的光源（402或412或502或802），第一反射表面（404或414或504或804）和第二反射表面（406或 416或506或806）。 第一反射表面具有沿着非供电方向投影抛物线轮廓的凸圆柱形状，其被配置为反射来自光源的光束并且其限定焦线。 第二反射表面具有凹入的圆柱形状，其具有投影的椭圆形轮廓，其被配置为反射来自第一反射表面的光束并且限定第一和第二焦线。 第一反射面的虚拟焦线与第二反射面的第一焦线重合。 其他实施例，方面和特征也被公开。

公开(公告)号：EP3213342A4

公开(公告)日：2018-06-06

申请号：EP16759622

申请日：2016-03-04

Applicant: KLA TENCOR CORP

Inventor： ZHANG SHIYU ,  ZHAO WEI

IPC: H01L21/66 ,  G02B13/14 ,  G02B17/06

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8845 ,  G02B13/143 ,  G02B17/0652 ,  G03F1/84 ,  G03F7/7065

Abstract: Disclosed are methods and apparatus for reflecting, towards a sensor, an Infrared to vacuum ultra-violet (VUV) light that is reflected from a target substrate. The system includes a first mirror arranged to receive and reflect the Infrared to VUV light that is reflected from the target substrate and a second mirror arranged to receive and reflect Infrared to VUV light that is reflected by the first mirror. The first and second mirrors are arranged and shaped so as to reflect Infrared to VUV light from the target substrate towards an optical axis of the apparatus. In another embodiment, the apparatus can also include a third mirror arranged to receive and reflect the Infrared to VUV light that is reflected by the second mirror and a fourth mirror arranged to receive and reflect such illuminating light that is reflected by the third mirror towards the sensor. In one more embodiment, a reflecting or refracting optics is used to relay the image by above optics to the sensor; various magnification is achieved by adjusting the distance between the intermediate image and the relay optics.