公开(公告)号：EP1393115A4

公开(公告)日：2010-03-17

申请号：EP02734188

申请日：2002-05-03

Applicant: KLA TENCOR TECH CORP

Inventor： SULLIVAN JAMIE ,  GIBSON JOHN ,  LI MINGGUANG ,  VELLA ERIC ,  JOHNSON RALPH THOMAS

IPC: G01B11/30 ,  G01N21/956 ,  G02B21/06 ,  G02B26/10 ,  G02F1/33 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G02B21/00

CPC classification number: G03F7/70616 ,  G01N21/956 ,  G02B26/10

公开(公告)号：AT535834T

公开(公告)日：2011-12-15

申请号：AT02734188

申请日：2002-05-03

Applicant: KLA TENCOR TECH CORP

Inventor： SULLIVAN JAMIE ,  GIBSON JOHN ,  LI MINGGUANG ,  VELLA ERIC ,  JOHNSON RALPH

IPC: G01B11/30 ,  G02B21/00 ,  G01N21/956 ,  G02B21/06 ,  G02B26/10 ,  G02F1/33 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66

Abstract: A system configured to scan a beam of light over a surface of a specimen, comprising a first acousto-optical deflector (44) configured to direct the beam of light at various angles along an angular scan, wherein an amplitude of the first acousto-optical deflector is modulated such that an intensity of the directed light varies over a length of the angular scan; a lens (52) configured to expand the directed beam of light and to convert the angular scan to linear scan; and a second acousto-optical deflector (54) configured as a traveling lens to focus the beam of light onto a scan line.