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公开(公告)号：EP1393115A4
公开(公告)日：2010-03-17
申请号：EP02734188
申请日：2002-05-03
Applicant: KLA TENCOR TECH CORP
Inventor： SULLIVAN JAMIE , GIBSON JOHN , LI MINGGUANG , VELLA ERIC , JOHNSON RALPH THOMAS
IPC: G01B11/30 , G01N21/956 , G02B21/06 , G02B26/10 , G02F1/33 , G03F7/20 , H01L21/027 , H01L21/66 , G02B21/00
CPC classification number: G03F7/70616 , G01N21/956 , G02B26/10
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