公开(公告)号：AT463736T

公开(公告)日：2010-04-15

申请号：AT04756129

申请日：2004-06-24

Applicant: KLA TENCOR TECH CORP

Inventor： LEWIS ISABELLA ,  VAEZ-IRAVANI MEHDI

IPC: G01N21/95 ,  G01N21/47 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956

Abstract: A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination beam to illuminate a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corresponding detector arrays, although a different number of channels and detector arrays may be used. One or both illumination beams are focused to a line on the surface to be inspected and each line is imaged onto one or more detector arrays in the up to three or more detection and collection channels. Relative motion is caused between the lines and the surface inspected in a direction perpendicular to the lines, thereby increasing throughput while retaining high resolution and sensitivity. The same detection channels may be employed by detecting scattered or reflected radiation from both illumination beams. Fourier filters may be employed to filter out diffraction at one or more different spatial frequencies.

公开(公告)号：DE602004026442D1

公开(公告)日：2010-05-20

申请号：DE602004026442

申请日：2004-06-24

Applicant: KLA TENCOR TECH CORP

Inventor： LEWIS ISABELLA ,  VAEZ-IRAVANI MEHDI

IPC: G01N21/95 ,  G01N21/47 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956

Abstract: A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination beam to illuminate a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corresponding detector arrays, although a different number of channels and detector arrays may be used. One or both illumination beams are focused to a line on the surface to be inspected and each line is imaged onto one or more detector arrays in the up to three or more detection and collection channels. Relative motion is caused between the lines and the surface inspected in a direction perpendicular to the lines, thereby increasing throughput while retaining high resolution and sensitivity. The same detection channels may be employed by detecting scattered or reflected radiation from both illumination beams. Fourier filters may be employed to filter out diffraction at one or more different spatial frequencies.