公开(公告)号：WO2006094115A3

公开(公告)日：2007-03-22

申请号：PCT/US2006007405

申请日：2006-03-01

Applicant: KLA TENCOR TECH CORP ,  BIELLAK STEPHEN ,  SHORT DAVID

Inventor： BIELLAK STEPHEN ,  SHORT DAVID

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/474 ,  G01N21/8806

Abstract: A system and method for inspection is disclosed. The design includes focusing illumination beams of radiation at an optical axis to an array of illuminated elongated spots on the surface at oblique angle(s) of incidence to the surface, performing a linear scan along a linear axis, wherein the linear axis is offset from the optical axis by a not insubstantial angular quantity, and imaging scattered radiation from the spots onto an array of receivers so that each receiver in the array receives scattered radiation from a corresponding spot in the array of spots.

Abstract translation: 公开了一种用于检查的系统和方法。 该设计包括将光轴上的照射光束照射到表面上的照射细长光斑阵列的倾斜角度，沿着线性轴进行线性扫描，其中线性轴线偏离 通过非实质角度量的光轴，并且将来自斑点的散射辐射成像到接收器阵列上，使得阵列中的每个接收器接收来自点阵列中的对应点的散射辐射。

公开(公告)号：EP1859257A4

公开(公告)日：2012-05-30

申请号：EP06736684

申请日：2006-03-01

Applicant: KLA TENCOR TECH CORP

Inventor： BIELLAK STEPHEN ,  SHORT DAVID

IPC: G01N21/88 ,  G01N21/47 ,  G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/474 ,  G01N21/8806