公开(公告)号：WO2005036634A2

公开(公告)日：2005-04-21

申请号：PCT/US2004/026548

申请日：2004-08-16

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： CHEN, Chien-Huei ,  BHAGAT, Vivek ,  SONG, Qiang ,  QUIGLEY, James A. ,  KULKARNI, Ashok V. ,  ISRANI, Rohit G.

IPC: H01L21/66

CPC classification number: G05B19/41875 ,  G01N21/8851 ,  G01N2021/8874 ,  G05B23/0235 ,  G05B2219/32184 ,  G05B2219/32222 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/22

Abstract: Characteristics of an inspection piece are sensed and analyzed to identify anomalies having level information. The level information is analyzed with an initial set of thresholds of inspection system parameters, and an initial portion of the anomalies are flagged as defects. A summary of the flagged anomalies is displayed, and an operating curve of potential flagged defects versus threshold parameters is also displayed. The parameters are selectively changed to form modified thresholds, and the level information of the anomalies is analyzed with the modified thresholds. An updated portion of anomalies is flagged as defects based on the immediately preceding analysis of the level information, and a summary of the flagged anomalies is displayed along with the recomputed operating curves. The steps of selectively changing thresholds and reflagging defects are repeated as desired, and the modified set of thresholds parameters is stored for use in an inspection system recipe.

Abstract translation: 感测和分析检查件的特性以识别具有液位信息的异常。 水平信息用检查系统参数的初始阈值分析，异常的初始部分被标记为缺陷。 显示标记异常的摘要，并显示潜在的标记缺陷与阈值参数的操作曲线。 这些参数被选择性地改变以形成修改的阈值，并且用修改的阈值分析异常的级别信息。 更新的部分异常被标记为基于水平信息的紧接在前的分析的缺陷，并且标记的异常的摘要与重新计算的操作曲线一起显示。 根据需要重复选择性地改变阈值和重新填充缺陷的步骤，并且存储修改的阈值参数集合以用于检查系统配方。

公开(公告)号：EP1656596B1

公开(公告)日：2011-07-27

申请号：EP04809572.3

申请日：2004-08-16

Applicant: KLA-Tencor Technologies Corporation

Inventor： CHEN, Chien-Huei ,  BHAGAT, Vivek ,  SONG, Qiang ,  QUIGLEY, James A. ,  KULKARNI, Ashok V. ,  ISRANI, Rohit G.

IPC: G05B19/418 ,  G06T7/00

CPC classification number: G05B19/41875 ,  G01N21/8851 ,  G01N2021/8874 ,  G05B23/0235 ,  G05B2219/32184 ,  G05B2219/32222 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/22

Abstract: Characteristics of an inspection piece are sensed and analyzed to identify anomalies having level information. The level information is analyzed with an initial set of thresholds of inspection system parameters, and an initial portion of the anomalies are flagged as defects. A summary of the flagged anomalies is displayed, and an operating curve of potential flagged defects versus threshold parameters is also displayed. The parameters are selectively changed to form modified thresholds, and the level information of the anomalies is analyzed with the modified thresholds. An updated portion of anomalies is flagged as defects based on the immediately preceding analysis of the level information, and a summary of the flagged anomalies is displayed along with the recomputed operating curves. The steps of selectively changing thresholds and reflagging defects are repeated as desired, and the modified set of thresholds parameters is stored for use in an inspection system recipe.

公开(公告)号：EP1656596A2

公开(公告)日：2006-05-17

申请号：EP04809572.3

申请日：2004-08-16

Applicant: KLA-Tencor Technologies Corporation

Inventor： CHEN, Chien-Huei ,  BHAGAT, Vivek ,  SONG, Qiang ,  QUIGLEY, James A. ,  KULKARNI, Ashok V. ,  ISRANI, Rohit G.

IPC: G05B19/418 ,  G06T7/00

CPC classification number: G05B19/41875 ,  G01N21/8851 ,  G01N2021/8874 ,  G05B23/0235 ,  G05B2219/32184 ,  G05B2219/32222 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/22

Abstract: Characteristics of an inspection piece are sensed and analyzed to identify anomalies having level information. The level information is analyzed with an initial set of thresholds of inspection system parameters, and an initial portion of the anomalies are flagged as defects. A summary of the flagged anomalies is displayed, and an operating curve of potential flagged defects versus threshold parameters is also displayed. The parameters are selectively changed to form modified thresholds, and the level information of the anomalies is analyzed with the modified thresholds. An updated portion of anomalies is flagged as defects based on the immediately preceding analysis of the level information, and a summary of the flagged anomalies is displayed along with the recomputed operating curves. The steps of selectively changing thresholds and reflagging defects are repeated as desired, and the modified set of thresholds parameters is stored for use in an inspection system recipe.