公开(公告)号：WO2003029799A1

公开(公告)日：2003-04-10

申请号：PCT/US2002/031518

申请日：2002-10-01

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： NASSER-GHODSI, Mehran ,  TESTONI, Anne ,  OESTREICH, Steve

IPC: G01N23/223

CPC classification number: G01N23/20

Abstract: The present invention provides a system for characterizing voids (411) in test samples. An X-ray emission inducer scans a target such as a via on a test sample. A metallization (409) or thin film layer (405) emits X-rays as a result of the scan. The X-ray emission intensity can be measured and compared against a control measurement. The information obtained can be used to characterize a void in the scan target.

Abstract translation: 本发明提供一种用于表征测试样品中的空隙（411）的系统。 X射线发射诱导器在测试样品上扫描诸如通孔的靶。 作为扫描的结果，金属化（409）或薄膜层（405）发射X射线。 可以测量X射线发射强度并与对照测量进行比较。 获得的信息可用于表征扫描目标中的空白。