公开(公告)号：WO2003038456A2

公开(公告)日：2003-05-08

申请号：PCT/US2002/034215

申请日：2002-10-24

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： CHEN, Doug ,  ALEXANDER, John ,  SAMSAVAR, Amin

IPC: G01R27/08

CPC classification number: G01N22/00 ,  G01B7/06

Abstract: A highly sensitive, non-contact tank probe to measure surface conductance of thin film structures, and a method for using the same, are described. The tank probe includes inductor (L), capacitor (C) and resistor (R) circuitry that is driven by a signal generator at the probe's resonant frequency. The conductance of a film structure specimen is determined from measuring the signal that is reflected from the tank probe and it respective frequency. Various types of information can be obtained from the tank probe. For instance, information as to film thickness, doping concentration, and the presence of defects can be obtained. In one embodiment of the invention, the tank probe is formed of integrated circuits within a semiconductor substrate. Another aspect of the present invention pertains to a method of using the tank probe system to measure the conductivity of a material specimen.

Abstract translation: 描述了用于测量薄膜结构的表面电导的高灵敏度非接触式罐探针及其使用方法。 油箱探头包括电感器（L），电容器（C）和电阻器（R）电路，其由探测器谐振频率处的信号发生器驱动。 通过测量从罐探针反射的信号及其各自的频率来确定膜结构样品的电导。 罐式探头可以获得各种信息。 例如，可以获得关于膜厚度，掺杂浓度和缺陷的存在的信息。 在本发明的一个实施例中，槽探针由半导体衬底内的集成电路形成。 本发明的另一方面涉及一种使用罐探针系统来测量材料样品的导电性的方法。