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    CATADIOPTRIC IMAGING SYSTEM EXHIBITING ENHANCED DEEP ULTRAVIOLET SPECTRAL BANDWIDTH
    1.
    发明申请
    CATADIOPTRIC IMAGING SYSTEM EXHIBITING ENHANCED DEEP ULTRAVIOLET SPECTRAL BANDWIDTH 审中-公开
    显示增强型深紫外光谱带宽的成像系统

    公开(公告)号：WO2006015142A2

    公开(公告)日：2006-02-09

    申请号：PCT/US2005/026835

    申请日：2005-07-28

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  CHUANG, Yung-Ho ,  ARMSTRONG, Joseph, J. ,  SHAFER, David, R.

    Inventor： CHUANG, Yung-Ho ,  ARMSTRONG, Joseph, J. ,  SHAFER, David, R.

    IPC: G02B1/00 ,  G02B5/20 ,  F21V9/06

    CPC classification number: G03F7/70225 ,  G02B17/0808 ,  G02B17/0812 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/02 ,  G03F7/70341

    Abstract: A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective comprises a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 manometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may comprise more than one lens and may be formed of a material different from at least one other lens in the objective.

    Abstract translation: 提供了用于成像样品的相对较高的光谱带宽目标和用于成像样品的方法。 该物镜包括透镜组，该透镜组具有被配置为接收光能并形成中间图像的至少一个聚焦透镜，被定向为接收中间图像并提供中间光能的至少一个场透镜，以及定位成接收中间图像 光能并将光能施加到样品上。 在某些情况下，该目标可以提供高达约193至266压力计的光谱带宽，并且可以提供超过0.9的数值孔径。 元件的直径小于100毫米，可以安装在标准显微镜内。 场镜可以包括多于一个透镜，并且可以由与物镜中的至少一个其他透镜不同的材料形成。

    HIGH PERFORMANCE CATADIOPTRIC IMAGING SYSTEM
    2.
    发明申请
    HIGH PERFORMANCE CATADIOPTRIC IMAGING SYSTEM 审中-公开
    高性能CATTIIOPTRIC成像系统

    公开(公告)号：WO2004077104A2

    公开(公告)日：2004-09-10

    申请号：PCT/US2004/005038

    申请日：2004-02-20

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    IPC: G02B

    CPC classification number: G02B17/0892 ,  G02B17/0812 ,  G02B17/0856 ,  G02B21/04 ,  G03F7/70225 ,  G03F7/70341

    Abstract: A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy and comprising at least one focusing lens. The objective further comprises at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.

    Abstract translation: 公开了一种减小尺寸的反射折射物镜和系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。 元件的直径小于100毫米。 该目的包括被配置为接收光能并且包括至少一个聚焦透镜的聚焦透镜组。 该目的还包括至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜。 该目的还包括Mangin镜布置，其定位成从场透镜接收中间光能并形成受控的光能以传输到样本。 芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY
    4.
    发明申请
    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY 审中-公开

    公开(公告)号：WO2005022204A3

    公开(公告)日：2005-03-10

    申请号：PCT/US2004/026782

    申请日：2004-08-18

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    Inventor： SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    IPC: G02B17/00

    Abstract: A system and method for inspection is disclosed. The design includes an objective employed for use with light energy having a wavelength in various ranges, including approximately 266 to 1000nm, 157nm through infrared, and other ranges. The objective comprises a focusing lens group (311) comprising at least one focusing lens (304) configured to receive light, a field lens (305) oriented to receive focused light energy from said focusing lens group (311) and provide intermediate light energy, and a Mangin mirror arrangement (312) positioned to receive the intermediate light energy from the field lens (305) and form controlled light energy. Each focusing lens has a reduced diameter, such as a diameter of less than approximately 100mm, and a maximum corrected field size of approximately 0.15mm. An immersion substance, such as oil, water, or silicone gel, may be employed prior to passing controlled light energy to the specimen (310) inspected.

    CATADIOPTRIC IMAGING SYSTEM EXHIBITING ENHANCED DEEP ULTRAVIOLET SPECTRAL BANDWIDTH
    5.
    发明公开
    CATADIOPTRIC IMAGING SYSTEM EXHIBITING ENHANCED DEEP ULTRAVIOLET SPECTRAL BANDWIDTH 审中-公开
    具有增强光谱DEEP-UV带宽折反射式图象系统

    公开(公告)号：EP1771753A2

    公开(公告)日：2007-04-11

    申请号：EP05778140.3

    申请日：2005-07-28

    Applicant: KLA-Tencor Technologies Corporation

    Inventor： CHUANG, Yung-Ho ,  ARMSTRONG, Joseph, J. ,  SHAFER, David, R.

    IPC: G02B5/08

    CPC classification number: G03F7/70225 ,  G02B17/0808 ,  G02B17/0812 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/02 ,  G03F7/70341

    Abstract: A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective comprises a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 manometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may comprise more than one lens and may be formed of a material different from at least one other lens in the objective.

    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY
    9.
    发明公开
    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY 有权
    折反射PICTURE SYSTEM FOR宽带观察

    公开(公告)号：EP1664885A2

    公开(公告)日：2006-06-07

    申请号：EP04786521.7

    申请日：2004-08-18

    Applicant: KLA-Tencor Technologies Corporation

    Inventor： SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    IPC: G02B17/00

    CPC classification number: G02B21/04 ,  G02B17/0808 ,  G02B17/0812 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/02 ,  G03F7/70225 ,  G03F7/70341

    Abstract: A system and method for inspection is disclosed. The design includes an objective employed for use with light energy having a wavelength in various ranges, including approximately 266 to 1000nm, 157nm through infrared, and other ranges. The objective comprises a focusing lens group (311) comprising at least one focusing lens (304) configured to receive light, a field lens (305) oriented to receive focused light energy from said focusing lens group (311) and provide intermediate light energy, and a Mangin mirror arrangement (312) positioned to receive the intermediate light energy from the field lens (305) and form controlled light energy. Each focusing lens has a reduced diameter, such as a diameter of less than approximately 100mm, and a maximum corrected field size of approximately 0.15mm. An immersion substance, such as oil, water, or silicone gel, may be employed prior to passing controlled light energy to the specimen (310) inspected.

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