公开(公告)号：WO2002091057A1

公开(公告)日：2002-11-14

申请号：PCT/US2002/014132

申请日：2002-05-03

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： SULLIVAN, Jamie ,  GIBSON, John ,  LI, Mingguang ,  VELLA, Eric ,  JOHNSON, Ralph, Thomas

IPC: G02B21/00

CPC classification number: G03F7/70616 ,  G01N21/956 ,  G02B26/10

Abstract: Systems and methods for scanning a beam of light over a specimen are provided. A system may include a pre-scan acousto-optical deflector (AOD) configured to deflect a beam of light (16), a seconds AOD (8) configured as a travelling lens to focus the scanning beam (28), a relay lens (36) and an objective lens (26). The relay lens may be centered on the scan line (30) produced by the second AOD, while the objective lens may be substantially de-centered with respect to the relay lens to produce a telecentric scanning spot with no field tilt. The system may modulate the amplitude of the sound wave in the first AOD to compensate for attenuation in the second AOD. The system may pre-fill one chirp packet (14) in the second AOD while another chirp packet is scanning to substantially reduce a delay between consecutive scans.

Abstract translation: 提供了用于在样本上扫描光束的系统和方法。 系统可以包括被配置为偏转光束（16）的预扫描声光偏转器（AOD），配置为行进透镜的秒AOD（8）以聚焦扫描光束（28），中继透镜 36）和物镜（26）。 中继透镜可以在由第二AOD产生的扫描线（30）上居中，而物镜可以相对于中继透镜基本上为中心，以产生没有场倾斜​​的远心扫描点。 该系统可以调制第一个AOD中的声波的幅度，以补偿第二个AOD中的衰减。 该系统可以预先填充第二个AOD中的一个线性调频组（14），而另一个啁啾分组正在扫描，以显着减少连续扫描之间的延迟。

公开(公告)号：EP1393115A1

公开(公告)日：2004-03-03

申请号：EP02734188.2

申请日：2002-05-03

Applicant: KLA-Tencor Technologies Corporation

Inventor： SULLIVAN, Jamie ,  GIBSON, John ,  LI, Mingguang ,  VELLA, Eric ,  JOHNSON, Ralph, Thomas

IPC: G02B21/00

CPC classification number: G03F7/70616 ,  G01N21/956 ,  G02B26/10

Abstract: Systems and methods for scanning a beam of light over a specimen are provided. A system may include a pre-scan acousto-optical deflector (AOD) configured to deflect a beam of light (16), a seconds AOD (8) configured as a travelling lens to focus the scanning beam (28), a relay lens (36) and an objective lens (26). The relay lens may be centered on the scan line (30) produced by the second AOD, while the objective lens may be substantially de-centered with respect to the relay lens to produce a telecentric scanning spot with no field tilt. The system may modulate the amplitude of the sound wave in the first AOD to compensate for attenuation in the second AOD. The system may pre-fill one chirp packet (14) in the second AOD while another chirp packet is scanning to substantially reduce a delay between consecutive scans.

公开(公告)号：EP1393115B1

公开(公告)日：2011-11-30

申请号：EP02734188.2

申请日：2002-05-03

Applicant: KLA-Tencor Technologies Corporation

Inventor： SULLIVAN, Jamie ,  GIBSON, John ,  LI, Mingguang ,  VELLA, Eric ,  JOHNSON, Ralph, Thomas

IPC: G02B21/00 ,  G02B26/10

CPC classification number: G03F7/70616 ,  G01N21/956 ,  G02B26/10

Abstract: Systems and methods for scanning a beam of light over a specimen are provided. A system may include a pre-scan acousto-optical deflector (AOD) configured to deflect a beam of light (16), a seconds AOD (8) configured as a travelling lens to focus the scanning beam (28), a relay lens (36) and an objective lens (26). The relay lens may be centered on the scan line (30) produced by the second AOD, while the objective lens may be substantially de-centered with respect to the relay lens to produce a telecentric scanning spot with no field tilt. The system may modulate the amplitude of the sound wave in the first AOD to compensate for attenuation in the second AOD. The system may pre-fill one chirp packet (14) in the second AOD while another chirp packet is scanning to substantially reduce a delay between consecutive scans.