公开(公告)号：JPS6068538A

公开(公告)日：1985-04-19

申请号：JP17551783

申请日：1983-09-22

Applicant: KOGYO GIJUTSUIN

Inventor： TOMIMASU TAKIO ,  NOGUCHI TSUTOMU ,  YANO HIROSHI

IPC: G21K1/093 ,  H01J35/00 ,  H01L21/027 ,  H05H7/00 ,  H05H13/04

Abstract: PURPOSE:To enable homogeneous stable irradiation of X-rays to be performed over a wide area by installing a variable-field-producing variable electromagnet which scans the electronic orbit in vertical direction with respect to time. CONSTITUTION:A variable electromagnet (diode) 11 used to change the optical path and having a lateral field component (Hh) is installed in the immediate back of a lateral-focusing tetraode electromagnet 9. At this point, an electron flux longitudinally focused with a longitudinal-focusing tetrode electromagnet 10 is slightly shifted in longitudinal direction by the lateral field component of the variable electromagnet 11. This shift is then amplified with the lateral focusing tetrode electromagnet 9 (for lateral focusing and longitudinal divergence) thereby greatly shifting the orbital surface of electrons traveling in a deflecting diode electromagnet 8 is vertical direction (Y direction). Consequently, synchrotron radiation (soft X-ray) 2 traveling over a wafer 4 moves in vertical direction.

公开(公告)号：JPS6070700A

公开(公告)日：1985-04-22

申请号：JP17898483

申请日：1983-09-27

Applicant: KOGYO GIJUTSUIN

Inventor： TOMIMASU TAKIO ,  NOGUCHI TSUTOMU ,  SUGIYAMA TAKU

IPC: H05H15/00 ,  H05H13/04

公开(公告)号：JPH0372172B2

公开(公告)日：1991-11-15

申请号：JP17551783

申请日：1983-09-22

Applicant: KOGYO GIJUTSUIN

Inventor： TOMIMASU TAKIO ,  NOGUCHI TSUTOMU ,  YANO HIROSHI

IPC: G21K1/093 ,  H01J35/00 ,  H01L21/027 ,  H05H7/00 ,  H05H13/04