公开(公告)号：JP2012109115A

公开(公告)日：2012-06-07

申请号：JP2010256958

申请日：2010-11-17

Applicant: KOREA BASIC SCIENCE INST

Inventor： KIM YANG-JUN ,  JUN JOHN-MAN

IPC: H01J37/20 ,  F16H19/04 ,  F16H21/46

Abstract: PROBLEM TO BE SOLVED: To provide a specimen holder capable of performing three-axis drive for three-dimensional analysis for a transmission electron microscope.SOLUTION: A specimen holder capable of performing three-axis drive for three-dimensional analysis for a transmission electron microscope can perform observation with high accuracy from more than three directions in order to analyze a single specimen or the complex internal structure. The specimen holder can rotate a cradle to support the specimen, and can three-dimensionally analyze the specimen more accurately by freely changing the direction of the specimen so that the cradle can move back and forth and from side to side.