公开(公告)号：JPH08116131A

公开(公告)日：1996-05-07

申请号：JP31531194

申请日：1994-12-19

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： BOKU KOUKUN ,  BOKU MINSHIYU ,  YU HEISHIYUU

IPC: H01S5/00 ,  H01S5/042 ,  H01S5/18 ,  H01S5/183 ,  H01S5/30 ,  H01S3/18

Abstract: PURPOSE: To provide a method for manufacturing an upper surface emission microlaser where an electrode can be formed easily and a current can be injected more efficiently by forming an electrode on the side surface of a resonator that is a projecting structure. CONSTITUTION: A substrate, where a lower mirror layer 2, an active layer 3, and an upper mirror layer 4 are successively grown, is etched onto a compound semiconductor substrate, a metal is deposited on the entire surface of a projecting part in a recessed and projecting structure which is etched, and the metal and the active layer 3 are subjected to ion-beam etching, thus forming a side surface electrode 9. After that, a polyimide layer 10 is covered, until the recessed and projecting structure can be completely covered, one portion of the polyimide layer 10 is eliminated until one portion of the side electrode 9 is exposed, a wiring electrode 11 is wired to the side surface of the exposed side surface electrode 9, a photoresist film and a protected film that remains at the projecting part for discharging laser beams upward are successively eliminated, and the surface of the upper mirror layer 4 is released.