Abstract:
A schottky barrier transistor and a method of manufacturing the same are provided. The method includes forming a gate insulating layer and a gate on a substrate, forming a spacer on a sidewall of the gate, and growing a polycrystalline silicon layer and a monocrystalline silicon layer on the gate and the substrate, respectively, using a selective silicon growth. A metal is deposited on the polycrystalline silicon layer and the monocrystalline silicon layer. Then, the metal reacts with silicon of the polycrystalline silicon layer and the monocyrstalline silicon layer to form a self-aligned metal silicide layer. Therefore, selective wet etching for removing an unreacted metal after silicidation can be omitted. Furthermore, etching damage caused during the formation of the spacer can be decreased during the growth of the monocrystalline silicon layer, thereby improving the electrical characteristics of devices.
Abstract:
Provided is an apparatus and method of initializing a recording layer used in manufacturing a phase-change optical disk for storing information. The optical disk (200) is initialized using a UV lamp (110) in order to initialize the recording layer of the phase-change optical disk (200) capable of repeatedly writing information, without a separate optical head, whereby it is possible to increase productivity by remarkably reducing an initialization time of the optical disk since a large area is initialized using a UV beam. The recording layer may have a main component made of at least one selected from a group consisting of Ge, Sb, Te, In, Sn and Ga, and an additive made of at least one of Ag and Bi.
Abstract:
Provided is an apparatus and method of initializing a recording layer used in manufacturing a phase-change optical disk for storing information. The optical disk (200) is initialized using a UV lamp (110) in order to initialize the recording layer of the phase-change optical disk (200) capable of repeatedly writing information, without a separate optical head, whereby it is possible to increase productivity by remarkably reducing an initialization time of the optical disk since a large area is initialized using a UV beam. The recording layer may have a main component made of at least one selected from a group consisting of Ge, Sb, Te, In, Sn and Ga, and an additive made of at least one of Ag and Bi.
Abstract:
PURPOSE: A transparent conductive layer for an electrode and the preparing method thereof are provided to obtain a high light transmittance and a low surface resistance in 450~750nm. CONSTITUTION: A transparent conductive layer for an electrode includes indium tin oxide, tin oxide, and metal oxide. The metal oxide is metal(M) which consists of at least two. It is treated by a reducing process. The ionic radius ratio of untreated metal oxide and metal oxide is a range of 1.2~1.7:1.
Abstract:
PURPOSE: An indium zinc oxide sputtering target and a method for manufacturing thereof are provided to obtain a sputtering target with a low resistance by employing titanium oxide as dopant. CONSTITUTION: An indium zinc oxide sputtering target comprises indium tin oxide, zinc oxide, and titanium oxide. The titanium oxide is TiO2-a employed as dopant instead of existing TiO2, where a is 0.5-1. The TiO2-a dopant improves the degree of freedom in the crystalline of a transparent film formed from the indium zinc oxide sputtering target, thereby enhancing the etching property of the transparent film.
Abstract translation:目的:提供一种铟锌氧化物溅射靶及其制造方法,通过使用氧化钛作为掺杂剂,获得具有低电阻的溅射靶。 构成:铟锌氧化物溅射靶包括氧化铟锡,氧化锌和氧化钛。 氧化钛是用作掺杂剂而不是现有TiO 2的TiO 2,其中a为0.5-1。 TiO 2 -a掺杂剂改善了由铟锌氧化物溅射靶形成的透明膜的结晶自由度,从而提高了透明膜的蚀刻性能。