Patent search ap:("KOREA ELECTRONICS TELECOMM") AND inv:"HAKU SHIYUUKIYOU" Page 1

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发明专利
PREPARATION OF SEMICONDUCTOR THIN FILM OF DEFECTLESS COMPOUND ON DIELECTRIC THIN FILM 失效

公开(公告)号：JPH08143398A

公开(公告)日：1996-06-04

申请号：JP29973194

申请日：1994-12-02

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： RI BAN , IN YOSHIHIDE , HAKU SHIYUUKIYOU

IPC: C30B29/42 , H01L21/20 , H01L21/205 , H01L21/316 , H01L27/12

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