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公开(公告)号：JPH07202533A
公开(公告)日：1995-08-04
申请号：JP28096994
申请日：1994-11-15
Applicant: KOREA ELECTRONICS TELECOMM
Inventor： KIYOU KOUYON , RI SOURETSU , IN TETSUSHIYOKU
Abstract: PURPOSE: To provide a manufacture of a passive element for information communication, especially a band pass filter with an excellent performance in a high frequency area. CONSTITUTION: An epitaxial thin film 5 of an oxide high temperature superconducting body is formed. A band pass filter with YBCO/MgO/Cu/Au or a YBCO/LaA103/Cr/Cu/Au structure for high frequency is manufactured by applying a photo lithographic process and a mixed etching process to the thin film 5. As a result, precision and sharpness of a circuit pattern formed on a substrate is much improved.
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