公开(公告)号：JPH07115114A

公开(公告)日：1995-05-02

申请号：JP33175292

申请日：1992-12-11

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： KIYOU SEISHIYUN ,  KIN HOYUU ,  BAI KAZUNARI

IPC: H01L21/66

Abstract: PURPOSE: To read out the value of an energy gap more simply in a short time, by passing the light source having a constant wavelength through a test piece, and utilizing the obtained characteristics of the transmitted spectrum with an image processing system. CONSTITUTION: The light having a constant wavelength band (λ) with an energy gap(Eg) as the center is irradiated on a test piece. After the transmission function of λ=f(x) is obtained with an optical filter 5, the image is formed. The live image plane from an image input device 6 is stored in the frame memory of an image-signal processor 7. Then, scanning is performed along the side (x) for the image on a monitor. The scanned pixel value (x) and the Eg pixel value Xgap are compared. At the place where both values agree, the (x) coordinates of the pixel are read, and the λ gap is obtained from the algorithm of λ=f(x). Then, the relationship of gap (eV)=1.239/λ gap (μm) is used, and the value is converted into [eV] unit of the gap, and Eg is obtained.