公开(公告)号：JPH0620908A

公开(公告)日：1994-01-28

申请号：JP34484891

申请日：1991-12-26

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： RI SHIYOUGEN ,  KIN JIYUNTAI ,  KIN HOYUU

IPC: B23Q1/00 ,  B23Q1/34 ,  B23Q1/36 ,  B23Q5/22 ,  B23Q5/28 ,  B23Q5/34 ,  G03F7/20 ,  G03F7/22 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  H01L41/09 ,  B23Q1/02

Abstract: PURPOSE: To eliminate measurement errors generated by an increase in height with changing displacement in a vertical direction by performing rotation in the vertical direction with the expansion displacement of an expansion part, enlarging the displacement and providing upper/lower direction and tilt driving device provided with a driving part for performing driving, linked with the rotation operation of a displacement-enlarging piece. CONSTITUTION: A roller 22 for upper/lower direction and tilt-driving transmits the enlarged displacement of an actuator to a vacuum chuck 6 in the vertical direction. Thus, it is turned to a driving point for the upper/lower direction and tilt driving device (A). Also, it is utilized as a guiding element for the rotation direction 27 of the roller for the upper/lower direction and tilt driving, and a roller supporting base 24 causes rotation movement along the structure of a circular V-groove 28. That is, the roller 22 for the upper/lower direction and tilt is rotated along the structure of the circular V-groove 28, and the rotation in a horizontal direction is enabled, without generating the displacement of the upper/lower direction and tilt.