公开(公告)号：JPH09161992A

公开(公告)日：1997-06-20

申请号：JP23540296

申请日：1996-09-05

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： JIYONDE KIMU ,  YUUNHO SON ,  KIYONIKU CHIYOO

IPC: G01N22/00 ,  G01N21/73 ,  H05H1/00

Abstract: PROBLEM TO BE SOLVED: To measure the low plasma density and local plasma density with high spatial resolution. SOLUTION: This microwave resonance probe is provided with a 1/4-wavelength parallel transmission line 10; the first magnetic loop 11 located adjacent to the transmission line 10, connected to a coaxial cable 13, and vibrating the transmission line 10; the second magnetic loop 11 outputting the signal transmitted through the transmission line 10 to an external output device; and a Pyrex pipe. The prescribed frequency is applied to the transmission line 10, the occurrence of the resonance with this frequency is detected, and the occurring time and maintaining period of the resonance of the plasma generated from an electron element are measured, the measurement is repeated each time the applied frequency is changed, and the change of the plasma density at a given position is measured timewise.