公开(公告)号：JPH08328049A

公开(公告)日：1996-12-13

申请号：JP31295095

申请日：1995-11-30

Applicant: KOREA ELECTRONICS TELECOMM ,  KOREA TELECOMMUNICATION

Inventor： CHIN SAIKI ,  SHIN SOUIKU ,  TEI MEIEI ,  SAI TAIGU

IPC: G02B6/12 ,  G02B6/13 ,  G02B6/35 ,  G02F1/01 ,  G02F1/313

Abstract: PROBLEM TO BE SOLVED: To provide such a manufacturing method of a heater-embedded planar channel waveguided type optical switch as being capable of restraining the transmission of heat generated in thin film heaters to neighboring channel waveguide to prevent leakage present situation between neighboring channel waveguide and increasing a heat transmission speed to increase a switching speed for operation with low operating power. SOLUTION: On a lower clad layer 13 in which channel waveguide 17a, 17b are formed, a first upper clad layer 19 is formed flat which is 5-10μm thick on the channel waveguide 17a, 17b. In areas corresponding to the channel waveguide 17a, 17b on the first upper clad layer, thin film heaters 21a, 21b are formed which has line widths as about twice as the line widths of the channel waveguide 17a, 17b. Then, on the first upper clad layer 19 and the thin film heaters 21a, 21b, a second upper clad layer 23 is formed which has 15-20μm thick. For the early heat radiation of the thin film heaters 21a, 21b, the second upper clad layer 23 is removed to expose the thin film heaters 21a, 21b.