公开(公告)号：KR20090049226A

公开(公告)日：2009-05-18

申请号：KR20070115398

申请日：2007-11-13

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO YONG JAI ,  CHEGAL WON ,  CHO HYUN MO

IPC: G01B11/06 ,  G01B11/00 ,  G01N21/00 ,  G01N21/41

CPC classification number: G01B11/0641 ,  G01N21/211 ,  G01N2021/213

Abstract: 본 발명은 단일 편광자 초점 타원계측기(single-polarizer focused-beam ellipsometer)에 관한 것으로, 보다 상세하게는 하나의 편광용 광분할기가 편광 발생장치, 광분할기 및 편광 검출장치의 역할을 하도록 간편화된 구조를 갖으며 다중 입사면 측정을 다중 입사각에 적용하는 측정방법을 채택함으로써 측정 정밀도가 향상된 초점 타원계측기에 관한 것인데 시편에 의해 반사된 빛의 편광상태 변화를 측정함으로써 시편의 광물성, 즉 박막 시편의 경우에는 박막의 두께 및 굴절률 등에 대한 정확한 정보들을 분석해낼 수 있는 측정기술이다.
이를 위하여 본 발명의 타원계측기는 광원(light source); 상기 광원으로부터 방출된 빛을 편광된 빛으로 분할하는 편광용 광분할기(polarizing beamsplitter); 상기 편광용 광분할기로부터 분할된 일부의 빛을 굴절시켜 시편에 집중시켜 조사시키는 대물렌즈(objective lens); 상기 시편으로부터 반사된 후 상기 대물렌즈 및 상기 편광용 광분할기를 통과한 빛을 수광하는 광검출기(photodetector); 상기 광검출기에 의해 검출된 빛의 세기(light intensity)를 다중 입사면 경로를 따라 상기 광검출기의 단위소자(pixel)에 해당되는 값으로 보정하여 연산처리하는 연산처리장치(central processing unit)를 포함하는 것을 특징으로 한다.
단일, 편광자, 초점, 타원계측기, 편광용 광분할기

公开(公告)号：SE1150497A1

公开(公告)日：2011-07-08

申请号：SE1150497

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/00 ,  G01N21/21 ,  G01N21/25

公开(公告)号：SE537028C2

公开(公告)日：2014-12-09

申请号：SE1150497

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/00 ,  G01N21/21 ,  G01N21/25

公开(公告)号：SE1150498A1

公开(公告)日：2011-07-08

申请号：SE1150498

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/21 ,  G01N33/53

公开(公告)号：WO2010062150A3

公开(公告)日：2010-09-10

申请号：PCT/KR2009007084

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS ,  CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/00 ,  G01N21/25

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.

Abstract translation: 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 表面等离子体共振（SPR）感测部，其设置在聚焦光束椭偏仪的物镜部分，以便根据偏振光的角度变化产生SPR; 以及流动单元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液，其中同时检测SPR和椭偏相位随角度和波长的变化而改变。

公开(公告)号：SE1550597A1

公开(公告)日：2015-05-08

申请号：SE1550597

申请日：2013-09-27

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/21 ,  G01N21/41 ,  G01N33/483

公开(公告)号：SE537033C2

公开(公告)日：2014-12-09

申请号：SE1150498

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/21 ,  G01N33/53

公开(公告)号：WO2010147300A3

公开(公告)日：2011-03-03

申请号：PCT/KR2010002461

申请日：2010-04-20

Applicant: KOREA RES INST OF STANDARDS ,  CHO YONG JAI ,  CHO HYUN MO ,  CHEGAL WON

Inventor： CHO YONG JAI ,  CHO HYUN MO ,  CHEGAL WON

IPC: G01N21/21 ,  G01N21/25 ,  G01N21/41 ,  G02B5/08

CPC classification number: G01N21/211 ,  G02B27/143

Abstract: The present invention relates to an ellipsometer using a half-mirror, and more particularly, to an ellipsometer using a half-mirror, in which, instead of using rectangular prism type or glass plate type beam splitter that transmits some of the light and reflects the rest of the light as in a conventional vertical incident type focused-beam ellipsometer, the light is reflected to half of the object lens by a half-mirror and the light reflected from the half of the focus of the object lens is not transmitted through the beam splitter but is detected directly by a photodetector, and thus light interference due to the beam splitter is prevented and the light intensity is increased to maximally four times to thereby allow more accurate and precise measurement and analysis of physical properties for a sample of nanofilm or nano-pattern.

Abstract translation: 本发明涉及一种使用半透镜的椭偏仪，更具体地说，涉及一种使用半透半反镜的椭偏仪，其中代替使用透射部分光并将其反射的矩形棱镜型或玻璃板式分束器 剩余的光如在传统的垂直入射型聚焦光束椭偏仪中那样，光被半透明反射到物镜的一半，并且从物镜的焦点的一半反射的光不透过 分光器，但是由光电检测器直接检测，因此防止了由于分束器引起的光干扰，并且将光强度增加到最大四倍，从而允许对纳米膜样品的物理性能的更准确和精确的测量和分析， 纳米图案。

公开(公告)号：WO2010062149A3

公开(公告)日：2010-09-10

申请号：PCT/KR2009007083

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS ,  CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/21 ,  G01N21/55

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon.

Abstract translation: 提供了一种使用光束轮廓椭圆光度法的多通道表面等离子体共振传感器; 更具体地涉及与使用多入射角度测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件耦合的高灵敏度测量技术。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光椭圆偏振仪; 表面等离子体共振（SPR）感测部分，其设置在聚焦光椭圆偏振仪的物镜部分处; 以及多通道流动单​​元，其提供包含与产生金属薄膜的表面等离子体激元结合或解离的生物材料的缓冲溶液。