公开(公告)号：KR20120048940A

公开(公告)日：2012-05-16

申请号：KR20100110439

申请日：2010-11-08

Applicant: KOREA RES INST OF STANDARDS

Inventor： YU HYUN UNG ,  PARK MIN GYU ,  CHOI SE BUM

IPC: G01N21/3563 ,  G01N1/28

Abstract: PURPOSE: A high-sensitive measuring method, a device for the same, a self-assembly monolayer used for the same in a process forming the self-assembly monolayer on a golden thin film using an infrared rays spectral device are provided to easily grow a self-assembly monolayer by forming a golden thin film less than 2 nano meter in both sides of a silicon. CONSTITUTION: A high-sensitive measuring method in a process forming the self-assembly monolayer on a golden thin film using an infrared rays spectral device is as follows. A silicon substrate in which golden thin film is formed in both surfaces is immersed in solution where organic molecules is melted so that a self-assembly monolayer is formed. The substrate where a monolayer is formed is taken out and installed in chamber where an infrared rays spectral device. Infrared ray is incident to one side end part of the silicon substrate where the monolayer is formed so that lights are successively reflected to both sides of the golden thin film. Lights projected by being reflected are incident to a detecting device by converting a progressive direction so that a light detection is performed.

Abstract translation: 目的：提供一种高灵敏度测量方法及其装置，使用红外线光谱装置在金色薄膜上形成自组装单层的工艺中使用的自组装单层，以便容易地生长 通过在硅的两面形成小于2纳米的金色薄膜，自组装单层。 构成：使用红外线光谱装置在金色薄膜上形成自组装单层的工艺中的高灵敏度测量方法如下。 将其中在两个表面上形成金色薄膜的硅衬底浸入有机分子熔化的溶液中，从而形成自组装单层。 将形成单层的基板取出并安装在红外线光谱装置的室内。 红外线入射到硅衬底的形成单层的一侧端部，使得光线被连续地反射到金色薄膜的两侧。 被反射的光通过转换逐行方向入射到检测装置，从而进行光检测。