公开(公告)号：US09921051B2

公开(公告)日：2018-03-20

申请号：US14323211

申请日：2014-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Jae-Wan Kim ,  Jong-Ahn Kim ,  Chu-Shik Kang ,  Jong-Han Jin

IPC: G01B11/06 ,  G01B11/14 ,  G01B9/02 ,  G01N21/21 ,  G01S17/36 ,  G01N21/45

CPC classification number: G01B11/06 ,  G01B9/0201 ,  G01B9/02081 ,  G01B11/14 ,  G01N21/211 ,  G01N21/45 ,  G01N2021/213 ,  G01S17/36

Abstract: Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating a first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of the first laser beam transmitting through the transparent substrate; irradiating a second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of the second laser beam transmitting through the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting through the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent rays by multiple internal reflection of the second laser beam is maintained at π/2.

公开(公告)号：US09651403B2

公开(公告)日：2017-05-16

申请号：US14540743

申请日：2014-11-13

Applicant: Korea Research Institute of Standards and Science

Inventor： Jong-Ahn Kim ,  Jae-Wan Kim ,  Tae-Bong Eom ,  Chu-Shik Kang ,  Jong-Han Jin

IPC: G01D5/347 ,  G01D5/245

CPC classification number: G01D5/34707 ,  G01D5/2455 ,  G01D5/34746 ,  G01D5/34776 ,  G01D5/34792

Abstract: Provided are an absolute position measurement method, an absolute position measurement apparatus, and a scale. The scale includes a scale pattern formed by replacing repeatedly arranged pseudo-random-codes with a sequence of a linear feedback shift register of N stages using a first symbol with first width representing a first state and a second symbol with second width representing a second state. The first is divided into two or more first symbol areas of different structures, and the second symbol is divided into two or more second symbol areas of different structures. There is at least one overlap area in which the first symbol and the second symbol overlap each other to have the same structure.

公开(公告)号：US20150069225A1

公开(公告)日：2015-03-12

申请号：US14540743

申请日：2014-11-13

Applicant: Korea Research Institute of Standards and Science

Inventor： Jong-Ahn Kim ,  Jae-Wan Kim ,  Tae-Bong Eom ,  Chu-Shik Kang ,  Jong-Han JIN

IPC: G01D5/347

CPC classification number: G01D5/34707 ,  G01D5/2455 ,  G01D5/34746 ,  G01D5/34776 ,  G01D5/34792

Abstract: Provided are an absolute position measurement method, an absolute position measurement apparatus, and a scale. The scale includes a scale pattern formed by replacing repeatedly arranged pseudo-random-codes with a sequence of a linear feedback shift register of N stages using a first symbol with first width representing a first state and a second symbol with second width representing a second state. The first is divided into two or more first symbol areas of different structures, and the second symbol is divided into two or more second symbol areas of different structures. There is at least one overlap area in which the first symbol and the second symbol overlap each other to have the same structure.

Abstract translation: 提供绝对位置测量方法，绝对位置测量装置和刻度。 标度包括通过使用具有表示第一状态的第一宽度的第一符号和代表第二状态的第二宽度的第二符号将具有N级的线性反馈移位寄存器的序列的重复排列的伪随机码替换的比例模式 。 第一符号区域分为两个或更多个不同结构的第一符号区域，第二符号被划分为两个或更多个不同结构的第二符号区域。 存在至少一个重叠区域，其中第一符号和第二符号彼此重叠以具有相同的结构。