公开(公告)号：US09673035B2

公开(公告)日：2017-06-06

申请号：US14442283

申请日：2013-08-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Jong Rok Ahn ,  Cheolsu Han ,  Sang Jung Ahn

IPC: H01J49/14 ,  H01J49/06 ,  H01J49/16

CPC classification number: H01J49/147 ,  H01J49/067 ,  H01J49/16

Abstract: According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.