公开(公告)号：WO2013141539A1

公开(公告)日：2013-09-26

申请号：PCT/KR2013/002175

申请日：2013-03-18

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： KIM, Jae-Wan ,  KIM, Jong-Ahn ,  JIN, Jong-Han ,  KANG, Chu-Shik ,  EOM, Tae-Bong

IPC: G01B11/06 ,  G01B9/02

CPC classification number: G01B11/06 ,  G01B11/0675

Abstract: Provided are a transparent substrate monitoring apparatus and a transparent substrate monitoring method. The transparent substrate monitoring apparatus includes a light emitting unit emitting light; a double slit disposed on a plane defined in a first direction and a second direction intersecting a propagation direction of incident light and includes a first slit and a second slit spaced apart from each other in the first direction to allow the light to pass therethrough; an optical detection unit measuring an intensity profile or position of an interference pattern formed on a screen plane; and a signal processing unit receiving a signal from the optical detection unit to calculate an optical phase difference or an optical path difference.

Abstract translation: 提供透明基板监视装置和透明基板监视方法。 透明基板监视装置包括发光部的发光部; 设置在沿着与入射光的传播方向相交的第一方向和第二方向限定的平面上的双狭缝，并且包括在所述第一方向上彼此间隔开的第一狭缝和第二狭缝，以允许光通过; 光学检测单元，测量形成在屏幕平面上的干涉图案的强度分布或位置; 以及信号处理单元，接收来自光学检测单元的信号以计算光学相位差或光程差。

公开(公告)号：WO2009031769A2

公开(公告)日：2009-03-12

申请号：PCT/KR2008/004799

申请日：2008-08-19

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  KIM, Jae-Wan ,  EOM, Tae-Bong ,  KIM, Jong-Ahn ,  KANG, Chu-Shik

Inventor： KIM, Jae-Wan ,  EOM, Tae-Bong ,  KIM, Jong-Ahn ,  KANG, Chu-Shik

IPC: H01S3/10

CPC classification number: H01S5/0687 ,  H01S5/005 ,  H01S5/0078 ,  H01S5/06804 ,  H01S5/0683

Abstract: A frequency- stabilized laser apparatus and a method for stabilizing the frequency of a laser are disclosed. A semiconductor laser emits a beam. An external reflector has a resonance frequency and feeds back the emitted beam to the semiconductor laser if the frequency of the emitted beam is equal to the resonance frequency. An interference signal generator generates an interference signal for detecting the wavelength of the emitted beam and a controller detects the wavelength of the beam from the generated interference signal. According to the frequency- stabilized laser apparatus and the method for stabilizing the frequency of the laser, it is possible to stabilize the frequency of the beam emitted from the semiconductor laser and output the beam having the stable frequency for a long period of time.

Abstract translation: 公开了一种频率稳定的激光装置和用于稳定激光频率的方法。 半导体激光器发射光束。 如果发射光束的频率等于共振频率，则外部反射器具有共振频率并将发射的光束反馈到半导体激光器。 干涉信号发生器产生用于检测所发射的光束的波长的干涉信号，并且控制器从所产生的干涉信号中检测波束的波长。 根据频率稳定的激光装置和用于稳定激光频率的方法，可以稳定从半导体激光器发射的光束的频率并长时间输出具有稳定频率的光束。 / p>