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公开(公告)号:US10283339B2
公开(公告)日:2019-05-07
申请号:US15518408
申请日:2015-10-07
Inventor: Chang Joon Park , Sang Jung Ahn , Cheolsu Han , Keu Chan Lee , Seok Rae Yoon
Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.