公开(公告)号：US10283339B2

公开(公告)日：2019-05-07

申请号：US15518408

申请日：2015-10-07

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Sang Jung Ahn ,  Cheolsu Han ,  Keu Chan Lee ,  Seok Rae Yoon

IPC: H01J49/14 ,  G01N27/62 ,  H01J49/26 ,  H01J49/00 ,  H01J49/06 ,  H01J49/42

Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.