公开(公告)号：WO2009082109A3

公开(公告)日：2009-07-02

申请号：PCT/KR2008/007367

申请日：2008-12-12

Applicant: CHUNG, Chin-Wook ,  KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  LEE, Minhyong ,  JANG, Sung-Ho ,  CHOI, Ik-Jin ,  KIM, Jung-Hyung ,  SHIN, Yong-Hyeon

Inventor： CHUNG, Chin-Wook ,  LEE, Minhyong ,  JANG, Sung-Ho ,  CHOI, Ik-Jin ,  KIM, Jung-Hyung ,  SHIN, Yong-Hyeon

IPC: H01L21/66

Abstract: Provided are a process monitoring apparatus and method. The process monitoring apparatus includes a process chamber in which a process is performed, a probe assembly disposed on the process chamber, and comprising a probe electrode, a plasma generator generating plasma around the probe assembly, and a drive processor applying an alternating current (AC) voltage having at least 2 fundamental frequencies to the probe assembly, and extracting process monitoring parameters.

公开(公告)号：WO2016122046A1

公开(公告)日：2016-08-04

申请号：PCT/KR2015/002324

申请日：2015-03-11

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： LEE, Joo-In ,  SHIN, Yong-Hyeon

IPC: H01L51/56 ,  H01L21/203 ,  H01L21/02

CPC classification number: C23C14/26 ,  C23C14/243 ,  H01L51/001

Abstract: Provided is a linear evaporation deposition apparatus that includes a vacuum container including a slit extending in a first direction; an evaporation crucible inserted into the slit to be disposed inside the vacuum container, including a storage space to store a deposition material, being made of a conductive material, heating the deposition material to generate vapor, injecting the vapor through a plurality of nozzles parts each connecting with the storage space, and extending in the first direction; an induction heating coil generating an induced electric field, inductively heating the evaporation crucible, extending in the first direction, and being disposed outside the vacuum container to inductively heat the evaporation crucible; and a dielectric window coupled with a surrounding portion of the slit of the vacuum container to seal the vacuum container, being disposed between the induction heating coil and the evaporation crucible, passing through the induced electric field generated by the induction heating coil, and extending in the first direction.

Abstract translation: 提供一种线性蒸发沉积装置，其包括：真空容器，其包括沿第一方向延伸的狭缝; 插入到狭缝中的蒸发坩埚被设置在真空容器内部，包括用于存储沉积材料的存储空间，由导电材料制成，加热沉积材料以产生蒸气，通过多个喷嘴部分喷射蒸气 与存储空间连接并沿第一方向延伸; 产生感应电场的感应加热线圈，感应加热蒸发坩埚，沿第一方向延伸，并设置在真空容器的外面，以感应加热蒸发坩埚; 以及与真空容器的狭缝的周围部分耦合的电介质窗口，以密封真空容器，设置在感应加热线圈和蒸发坩埚之间，穿过感应加热线圈产生的感应电场，并延伸到 第一个方向。

公开(公告)号：WO2014189228A1

公开(公告)日：2014-11-27

申请号：PCT/KR2014/004331

申请日：2014-05-14

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： LEE, Joo-In ,  KIM, Jung-Hyung ,  YOO, Yong-Shim ,  YOU, ShinJae ,  SHIN, Yong-Hyeon

IPC: H01L51/56 ,  C23C14/24

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/26

Abstract: Provided is an evaporation deposition apparatus which includes an evaporation part providing an evaporation material through a connection path; a distribution part having a plurality of holes and injecting the evaporation material into a vacuum container through the holes; a dielectric part mounted in the vicinity of an opening of the vacuum container and disposed to protrude from the vacuum container and to cover the evaporation part and the distribution part; an induction coil covering the distribution part and the distribution part and inductively heating the evaporation part and the distribution part; and an alternating current (AC) power source supplying AC to the induction coil.

Abstract translation: 提供了一种蒸发沉积设备，其包括通过连接路径提供蒸发材料的蒸发部件; 分配部分具有多个孔并且通过所述孔将所述蒸发材料注入真空容器中; 绝缘部，安装在所述真空容器的开口附近并且设置成从所述真空容器突出并覆盖所述蒸发部和所述分配部; 覆盖分配部和分配部的感应线圈，并且感应加热蒸发部和分配部; 以及向感应线圈提供AC的交流（AC）电源。