公开(公告)号：WO2014189228A1

公开(公告)日：2014-11-27

申请号：PCT/KR2014/004331

申请日：2014-05-14

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： LEE, Joo-In ,  KIM, Jung-Hyung ,  YOO, Yong-Shim ,  YOU, ShinJae ,  SHIN, Yong-Hyeon

IPC: H01L51/56 ,  C23C14/24

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/26

Abstract: Provided is an evaporation deposition apparatus which includes an evaporation part providing an evaporation material through a connection path; a distribution part having a plurality of holes and injecting the evaporation material into a vacuum container through the holes; a dielectric part mounted in the vicinity of an opening of the vacuum container and disposed to protrude from the vacuum container and to cover the evaporation part and the distribution part; an induction coil covering the distribution part and the distribution part and inductively heating the evaporation part and the distribution part; and an alternating current (AC) power source supplying AC to the induction coil.

Abstract translation: 提供了一种蒸发沉积设备，其包括通过连接路径提供蒸发材料的蒸发部件; 分配部分具有多个孔并且通过所述孔将所述蒸发材料注入真空容器中; 绝缘部，安装在所述真空容器的开口附近并且设置成从所述真空容器突出并覆盖所述蒸发部和所述分配部; 覆盖分配部和分配部的感应线圈，并且感应加热蒸发部和分配部; 以及向感应线圈提供AC的交流（AC）电源。