公开(公告)号：US12152982B2

公开(公告)日：2024-11-26

申请号：US17921706

申请日：2020-09-21

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyun Mo Cho ,  Dong Hyung Kim ,  Won Chegal ,  Yong Jai Cho

IPC: G01N21/21 ,  G01N21/11 ,  G01N21/75

Abstract: An embodiment of the present disclosure provides a multi-reflection silicon-based liquid immersion micro-channel measurement device and measurement method capable of improving measurement sensitivity by completely separating, through multi-reflection, first reflective light reflected by a sample detection layer and a second reflective light by a prism-buffer solution interface and by allowing the light to enter multiple times through the multi-reflection. The multi-reflection silicon-based liquid immersion micro-channel measurement device according to the embodiment of the present disclosure includes a micro-channel structure including a support, and one or more micro-channels formed on the support and each having a sample detection layer with a fixed bioadhesive material for detecting a sample, a sample injection unit configured to inject a buffer solution containing the sample into the micro-channel, a prism unit including a prism, and a reflection structure formed by coating a bottom surface of the prism with a mirror reflection material, the polarized light generating unit configured to generate polarized light, and the polarized light detecting unit configured to detect a polarization change of reflected light.

公开(公告)号：US20160169742A1

公开(公告)日：2016-06-16

申请号：US14969096

申请日：2015-12-15

Applicant: Korea Research Institute of Standards and Science

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01J3/447 ,  G01J4/04

CPC classification number: G01J3/447 ,  G01J4/04 ,  G01N21/211 ,  G01N2021/213

Abstract: Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.

Abstract translation: 本发明提供了一种旋转元件分光椭偏仪和旋转元件分光椭偏仪的精度预测方法，用于执行旋转元件分光椭偏仪的记录介质存储程序以及存储在其执行介质的计算机程序， 旋转元件分光椭偏仪和用于测量旋转元件分光椭偏仪的精度预测的方法，其能够基于关于样品的椭偏参数的标准偏差的理论等式计算旋转元件分光椭偏仪的测量精度，记录 用于执行该存储程序的介质存储程序和存储在用于执行该程序的介质中的计算机程序。

公开(公告)号：US10921241B2

公开(公告)日：2021-02-16

申请号：US15532896

申请日：2016-04-27

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyun Mo Cho ,  Won Chegal ,  Yong Jai Cho

IPC: G01N21/21 ,  G01B11/06 ,  B01L3/00 ,  G01N21/41

Abstract: An oblique incidence, prism-incident, silicon-based, immersion microchannel-based measurement device may include: a microchannel structure which has a support, a substrate which is formed on the support and made of a semiconductor or dielectric material, a cover part which has a prism structure and is installed on the support, and a microchannel which is formed in any one of an upper portion of the support and a lower end of the cover part; a sample injection part which forms an adsorption layer for a sample on a substrate by injecting a buffer solution containing the sample made of a biomaterial into the microchannel; a polarized light generation part which emits polarized incident light through an incident surface of the prism to the adsorption layer at an incident angle that satisfies a p-wave antireflection condition; and a polarized light detection part.

公开(公告)号：US11719624B2

公开(公告)日：2023-08-08

申请号：US16464792

申请日：2016-12-15

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC: G01N21/05 ,  B01L3/00 ,  G01N21/21 ,  G01N33/543 ,  G01N21/03

CPC classification number: G01N21/05 ,  B01L3/502715 ,  G01N21/21 ,  G01N33/54366 ,  B01L2300/0654 ,  B01L2300/0663 ,  G01N21/211 ,  G01N2021/0378 ,  G01N2021/052

Abstract: The present invention relates to a liquid immersion micro-channel measurement device and measurement method which are based on trapezoidal incident structure prism incident-type silicon, and according to one embodiment of the present invention, the liquid immersion micro-channel measurement device based on trapezoidal incident structure prism incident-type silicon comprises: a micro-channel structure including a support and at least one micro-channel, which is formed on the support and has a sample detection layer to which a first bioadhesive material for detecting a first sample is fixed; a quadrangular pyramid-shaped prism formed on the upper part of the micro-channel structure; a sample injection unit for injecting, into the micro-channel, a buffer solution containing the first sample; a polarized light generation unit for emitting incident light polarized through the prism on the micro-channel at an incident angle that satisfies a p-wave non-reflection condition; and a polarized light detection unit for detecting, from the polarized incident light, a polarization change in a first refection light reflected from the sample detection layer, wherein the prism completely reflects, from the polarized incident light incident on the prism, on an upper boundary surface of the prism, second reflection light reflected from a lower boundary surface of the prism and a boundary surface of the buffer solution injected into the micro-channel.

公开(公告)号：US10145785B2

公开(公告)日：2018-12-04

申请号：US14906433

申请日：2014-05-13

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01N21/21 ,  G01J4/00 ,  G01J4/04

Abstract: Provided is an optical element rotation type Mueller-matrix ellipsometer for solving a problem of measurement accuracy and measurement precision occurring due to residual polarization of a light source, polarization dependence of a photo-detector, measurement values of Fourier coefficients of a high order term in dual optical element rotation type Mueller-matrix ellipsometers according to the related art capable of measuring some or all of components of a Mueller-matrix for any sample.

公开(公告)号：US20160153894A1

公开(公告)日：2016-06-02

申请号：US14906433

申请日：2014-05-13

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01J4/00 ,  G01J4/04 ,  G01J2004/001 ,  G01N2021/213 ,  G01N2201/0683 ,  G01N2201/11

Abstract: Provided is an optical element rotation type Mueller-matrix ellipsometer for solving a problem of measurement accuracy and measurement precision occurring due to residual polarization of a light source, polarization dependence of a photo-detector, measurement values of Fourier coefficients of a high order term in dual optical element rotation type Mueller-matrix ellipsometers according to the related art capable of measuring some or all of components of a Mueller-matrix for any sample.

Abstract translation: 提供一种光学元件旋转型米勒矩阵椭偏仪，用于解决由于光源的残余极化产生的测量精度和测量精度的问题，光检测器的偏振度依赖性，高阶项的傅里叶系数的测量值 根据相关技术的双光学元件旋转型米勒矩阵椭偏仪能够测量任何样品的Mueller矩阵的一些或全部组分。

公开(公告)号：US11493433B2

公开(公告)日：2022-11-08

申请号：US17256966

申请日：2019-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01N21/21 ,  G01B11/27 ,  G01N21/13

Abstract: The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.

公开(公告)号：US10458901B2

公开(公告)日：2019-10-29

申请号：US14432066

申请日：2013-09-27

Applicant: Korea Research Institute of Standards and Science

Inventor： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC: G01N21/21 ,  G01N21/05 ,  G01N21/41 ,  G01N21/25

Abstract: An apparatus and method for simultaneously measuring, in an immersion microchannel environment, the characteristics of molecular junctions such as a low-molecular-weight biomaterial and the like and the refractive index of a buffer solution by using ellipsometry. Specifically, disclosed is an apparatus for simultaneously measuring, with high sensitivity, the change in refractive index of a buffer solution and the junction dynamic characteristics of a biomaterial by allowing polarized incident light to be received at a biomaterial adsorption layer, which is formed on a substrate such as a semiconductor and the like, so as to meet an anti-reflection condition of a P-wave by using a prism structure and a microchannel; and a measurement method using the same.

公开(公告)号：US10317334B2

公开(公告)日：2019-06-11

申请号：US15557446

申请日：2016-03-08

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01J4/04 ,  G01N21/21 ,  G01B11/06 ,  G01N21/84

Abstract: The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.

公开(公告)号：US09581498B2

公开(公告)日：2017-02-28

申请号：US14969096

申请日：2015-12-15

Applicant: Korea Research Institute of Standards and Science

Inventor： Yong Jai Cho ,  Won Chegal ,  Hyun Mo Cho

IPC: G01J4/00 ,  G01J3/447 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01J3/447 ,  G01J4/04 ,  G01N21/211 ,  G01N2021/213

Abstract: Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.

Abstract translation: 本发明提供了一种旋转元件分光椭偏仪和旋转元件分光椭偏仪的精度预测方法，用于执行旋转元件分光椭偏仪的记录介质存储程序以及存储在其执行介质的计算机程序， 旋转元件分光椭偏仪和用于测量旋转元件分光椭偏仪的精度预测的方法，其能够基于关于样品的椭偏参数的标准偏差的理论等式计算旋转元件分光椭偏仪的测量精度，记录 用于执行该存储程序的介质存储程序和存储在用于执行该程序的介质中的计算机程序。