公开(公告)号：JP2001207268A

公开(公告)日：2001-07-31

申请号：JP2000018886

申请日：2000-01-27

Applicant: KUBOTA KK

Inventor： MIZOGUCHI TAKAHIRO ,  YOKOTA KOJI ,  HAYAKAWA YOSHITO ,  MAEDA MAKOTO ,  HARA HIRONORI ,  KUBOTA MASAMI

IPC: H01L21/31 ,  C23C16/27 ,  C23C16/505 ,  H05H1/46

Abstract: PROBLEM TO BE SOLVED: To prevent the deposition of a thick film of inferior quality, to reduce the generation of particles, therefore to improve the quality of the body to be treated and moreover to facilitate the maintenance of the system by securely generating plasma even without introducing film deposition gas under the high pressure at the time of the start of discharge. SOLUTION: Film deposition gas (C2H2) is introduced under the prescribed pressure from a gas introducing means to a film deposition chamber, simultaneously, non-film deposition gas (Ar) is spike-introduced, e.g. under the pressure sufficiently higher than the gas pressure on the lower limit in the limitation of discharge, and plasma is generated by a plasma generating means. The film deposition gas is continued to be fed as it is, and the body to be treated is subjected to film deposition. Upon the end of the film deposition, the feed of the film deposition gas is stopped, and the plasma discharge is finished. Then, at the time of repeatedly subjecting the body to be treated to film deposition, film deposition gas is again introduced, and simultaneously, non-film deposition gas is spike-introduced to generate plasma, and the film deposition is performed.

公开(公告)号：JPH0420450B2

公开(公告)日：1992-04-02

申请号：JP15087785

申请日：1985-07-09

Applicant: KUBOTA KK

Inventor： TSUDA AKIRA ,  KUBOTA MASAMI

IPC: E02F3/43 ,  E02F9/22

公开(公告)号：JP2002343761A

公开(公告)日：2002-11-29

申请号：JP2001146372

申请日：2001-05-16

Applicant: KUBOTA KK

Inventor： MAEDA MAKOTO ,  ODAWA MASAHIRO ,  YAO MASAYUKI ,  INOUE NAOKI ,  KANDA MASAYUKI ,  HAYAKAWA YOSHITO ,  KUBOTA MASAMI ,  HARA HIRONORI

IPC: B08B5/00 ,  B08B7/00 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To reliably remove foreign objects, to improve the rate of foreign object removal, to prevent the foreign objects from adhering onto a substrate surface again, and to prevent an extremely small amount of scattering. SOLUTION: Compressed fluid is jetted to the outer edge of a spot P from first and second jet ports 38a and 40a of a nozzle 36, and is sprayed at a spraying angle α being smaller than 90 degrees. Each compressed fluid flows within the range of the spot P, and collides one another near the center between the first and second jet ports 38a and 40a. In addition, the compressed fluid that flows within the range of the spot P gives kinetic energy to foreign objects for supporting the peeling/floating of the foreign objects due to laser irradiation. Then, the foreign objects including extremely small ones that are subjected to the peeling/floating swim with the current of the compressed fluid. A suction port 42a is arranged ahead the flow of the compressed fluid that has collided, thus sucking the foreign objects to the suction port 42a with the compressed fluid by allowing suction force to operate.

公开(公告)号：JP2000356600A

公开(公告)日：2000-12-26

申请号：JP16767699

申请日：1999-06-15

Applicant: KUBOTA KK

Inventor： KOBAYASHI HIROSHI ,  MITA HIROSHI ,  SAEKI KAKI ,  INOUE TOYOFUMI ,  TERAO MOTOHIRO ,  HAMADA AKIO ,  KUBOTA MASAMI ,  IMACHI HIROSHI ,  CHIKAI NORIAKI ,  HARA HIRONORI

IPC: G01B11/30 ,  G01N21/88 ,  G01N21/95

Abstract: PROBLEM TO BE SOLVED: To easily recognize a flaw by a person's eye by moving a flaw to the place just under a microscope on the basis of flaw detection data and to permit the accurate positioning of the flaw because the fine vibration of a disk is stopped by bringing a disc into contact with a spindle under pressure. SOLUTION: At first, a microcomputer drives an actuator motor 36 to bring a disc 38 into contact with the side surface of a spindle 22 under pressure and next controls a stage motor 18 and a disc motor 40 on the basis of the flaw position data stored in a memory. When the stage motor 18 is rotated, a uniaxial stage 14 is moved in the length direction of a lead screw 16. When the disc motor 22 is rotated, the spindle 22 is rotated in cooperation therewith. When the flaw of a disc 30 is moved to the place just under a microscope 44 by this operation, the microcomputer stops the actuator motor 36 and the disc motor 40.

公开(公告)号：JP2000288496A

公开(公告)日：2000-10-17

申请号：JP10186799

申请日：1999-04-08

Applicant: KUBOTA KK

Inventor： YAO MASAYUKI ,  IMACHI HIROSHI ,  HAYAKAWA YOSHITO ,  HARA HIRONORI ,  KUBOTA MASAMI

IPC: B08B7/00 ,  G11B5/84 ,  H01L21/268 ,  H01L21/302 ,  H01L21/3065

Abstract: PROBLEM TO BE SOLVED: To provide a cleaning device capable of reducing the frequency of maintenance due to deterioration of a laser system, capable of efficiently removing defect even if a material is liable to be damaged such as aluminum and glass. SOLUTION: The laser beam emitted from a laser diode(LD) 8 for detecting the defect and the laser beam emitted from an excimer laser 2 for removing the defect are made slantly incident on the surface of a hard disk substrate S, on the other hand, the pulselike laser beam for removing the defect is applied on the surface of the hard disk substrate S in the ratio of 1 to several pulses per one point, then the detection of the defect is executed, and the defect which can not be removed by the first irradiation is removed by re-applying the laser beam for removing the defect.

公开(公告)号：JPH0526897B2

公开(公告)日：1993-04-19

申请号：JP27004784

申请日：1984-12-20

Applicant: KUBOTA KK

Inventor： TSUDA AKIRA ,  KUBOTA MASAMI

IPC: E02F3/43

公开(公告)号：JP2001207263A

公开(公告)日：2001-07-31

申请号：JP2000018885

申请日：2000-01-27

Applicant: KUBOTA KK

Inventor： MIZOGUCHI TAKAHIRO ,  YOKOTA KOJI ,  HAYAKAWA YOSHITO ,  MAEDA MAKOTO ,  HARA HIRONORI ,  KUBOTA MASAMI

IPC: C23C16/44 ,  H01L21/205

Abstract: PROBLEM TO BE SOLVED: To simplify and miniaturize the structure of the film deposition system. SOLUTION: At the time of film deposition, a gate valve 28 is released, the opening 30c of a film deposition chamber 30 is opened, and a substrate 14 fixed to a holding part 20 is carried from the opening 30c to the inside of the film deposition chamber 30. Then, film deposition gas made into plasma by a plasma generating system 32 is introduced into the film deposition chamber 30 and is reacted on the surface of the substrate 14 to deposit a film. At the time of cleaning, the substrate 14 is carried out from the film deposition chamber 30, the gate valve 28 is closed, and the opening 30c is shuttered. Then, the cleaning gas made into plasma by the plasma generating system 32 is introduced into the film deposition chamber 30 and is reacted with the film adhered to the inner wall or the like of the film deposition chamber 30 to remove the same.

公开(公告)号：JP2001195714A

公开(公告)日：2001-07-19

申请号：JP2000004197

申请日：2000-01-13

Applicant: KUBOTA KK

Inventor： TANAKA TAKUO ,  KUBOTA MASAMI ,  INOUE NAOKI ,  TERAO MOTOHIRO ,  INOUE TOYOFUMI ,  MITA HIROSHI ,  SAEKI KAKI

IPC: G11B5/455

Abstract: PROBLEM TO BE SOLVED: To easily and exactly measure the floating height H of a head 12 over a wide range. SOLUTION: A unit 50 is lowered stepwise and in the positions of the respective steps, the interference light intensity for one circumference of a disk 14 is detected. The position of the unit 50 where the interference light intensity peaks relating to the measurement point set for the disk 14 is searched out. Namely, the first peak of the interference light intensity based on the reflected light from the rear surface of the disk 14 and the second peak of the interference light intensity based on the reflected light from the head 12 are detected and the first and second positions of the unit 50 corresponding to the first and second peaks are detected. The spacing between the first and second positions is calculated as the floating height H.

公开(公告)号：JP2001184632A

公开(公告)日：2001-07-06

申请号：JP36426899

申请日：1999-12-22

Applicant: KUBOTA KK

Inventor： INOUE TOYOFUMI ,  KUBOTA MASAMI ,  TERAO MOTOHIRO ,  CHIKAI NORIAKI ,  IMACHI HIROSHI ,  KOBAYASHI HIROSHI ,  MITA HIROSHI ,  SAEKI KAKI

IPC: G11B5/84

Abstract: PROBLEM TO BE SOLVED: To miniaturize a device as a whole, and to facilitate its combination with other device 92. SOLUTION: For glide inspection, first, a head plate 54 is turned on a turning stage 38 to position a burnishing head 16 with respect to a disk 12, and at a head elevating/lowering portion 58, the burnishing head 16 is lowered to float on the surface of the disk 12. Then, the disk 12 is scanned by the burnishing head 16 while the disk 12 is moved on a one-axis stage 76, and a relatively large projection is eliminated. Subsequently, the number of projections is detected by floating a glide inspection head 14 on the surface of the disk 12. For combination with the other device 92, the disk 12 is transferred by using the one-axis stage 76.

公开(公告)号：JP2000171405A

公开(公告)日：2000-06-23

申请号：JP34746898

申请日：1998-12-07

Applicant: KUBOTA KK

Inventor： YAO MASAYUKI ,  IMACHI HIROSHI ,  HAYAKAWA YOSHITO ,  HARA HIRONORI ,  KUBOTA MASAMI

IPC: G11B5/84 ,  G01B11/30 ,  G01N21/88 ,  G01N21/95

Abstract: PROBLEM TO BE SOLVED: To obtain a defect inspection apparatus in which an inspection processing operation is executed in parallel and in which a processing speed can be doubled by a method wherein a plurality of beam splitters are arranged in tandem on the optical axis of a laser beam and beams of reflected light by the respective beam splitters are received by CCD arrays whose number is identical to that of the beam splitters. SOLUTION: Beam splitters B0 to Bn which are arranged in tandem as n+1 pieces of optical reflection means are fixed in the upper part of a magnetic recording disk 1 in a state such that their reflection faces are tilted by 45 deg. to the same direction. By using the beam splitter B0 which is the closest to the disk 1, a laser beam which is irradiated from a laser light source 3 arranged horizontally so as to face the beam splitter is deflected downward, and the laser beam irradiates the disk face of the disk 1 vertically. When there is defect, the laser beam is reflected diffusely by the part of the defect on the surface of the disk 1, and it is received by CCD arrays C1 to Cn in such a way that a shade part is generated by a pixel. A light received result is output to A/D convertes A1 to An, it is converted into a digital signal so as to be given to an image processing part 4, and luminance data on the CCD arrays C1 to Cn is compared with a luminance threshold for every pixel.