公开(公告)号：JPH08285191A

公开(公告)日：1996-11-01

申请号：JP8440495

申请日：1995-04-11

Applicant: KUBOTA KK

Inventor： SHIMADA YOSHIAKI ,  KIMURA ICHIJI ,  KIMURA TAKASHI ,  YOSHIGAMI YOSHIAKI ,  NAKAMURA YUKIHIRO ,  ODAWA MASAHIRO

IPC: F17C5/02 ,  B65G47/82 ,  B65G47/90 ,  F17C5/06

Abstract: PURPOSE: To provide a high pressure gas filling device by which carrying-in work and carrying-out work can be automated without changing the timing and a moving position. CONSTITUTION: A high pressure gas filling device is provided with a carrying-in holding device 25 which can freely move between a carrying-in line 20 and a carrying-in line connecting place of a rotary table 2 in a posture of holding a cylinder and a synchronous carrying-in mechanism 40 which rotates while synchronizing with rotation of the rotary table 2 by bringing its contact object roller 42a into contact with a contact member 9 arranged on the rotary table 2 side and moves the carrying-in holding device 25 holding a cylinder 5 onto the rotary table 2 from the carrying-in line 20.

公开(公告)号：JPH08219394A

公开(公告)日：1996-08-30

申请号：JP2445695

申请日：1995-02-14

Applicant: KUBOTA KK

Inventor： SHIMADA YOSHIAKI ,  KIMURA ICHIJI ,  KIMURA TAKASHI ,  YOSHIGAMI YOSHIAKI ,  NAKAMURA YUKIHIRO ,  ODAWA MASAHIRO

IPC: F17C5/02

Abstract: PURPOSE: To provide a rotary table type high pressure gas charging device that can charge without an error and without the rotary table side being communicated with the outside. CONSTITUTION: A writing device 16 records data required for charging in a contactless tag 15 fitted to a cylinder 12 in a carry-in line. On the rotary table side, a reading device 21 detects data on each cylinder from the contactless tag 15 attached to the carried-in cylinder. On the basis of the detected data of the reading device 21, a charging control device 22 controls the charging action of each charging machine.

公开(公告)号：JPH08170797A

公开(公告)日：1996-07-02

申请号：JP31541594

申请日：1994-12-20

Applicant: KUBOTA KK

Inventor： SHIMADA YOSHIAKI ,  KIMURA ICHIJI ,  KIMURA TAKASHI ,  YOSHIGAMI YOSHIAKI ,  NAKAMURA YUKIHIRO ,  ODAWA MASAHIRO

IPC: F17C5/02

Abstract: PURPOSE: To provide a high pressure gas charging device capable of the maintenance during a short suspension period. CONSTITUTION: A rotary table 1 is stopped by positioning at the first maintenance pit 35a, and a failured charging machine is removed from the rotary table to be pushed to the first maintenance pit 35a. The rotary table 1 is operated to be positioned to the second maintenance pit 35b and stopped. Rapid charging can be re-started by pushing a normal charging machine 20 ready at the second maintenance pit 35b into the empty space of the rotary table 1, and fitting thereto.

公开(公告)号：JP2001129780A

公开(公告)日：2001-05-15

申请号：JP31450399

申请日：1999-11-05

Applicant: KUBOTA KK

Inventor： FUKUTAKE YASUYUKI ,  HAMADA AKIO ,  TERAO MOTOHIRO ,  ODAWA MASAHIRO

IPC: G11B5/84 ,  B25J15/08 ,  G11B7/26

Abstract: PROBLEM TO BE SOLVED: To prevent dispersion of dust or a play in an operating part, to improve machining precision in use for a disk manufacturing device, and to improve inspection precision in use for a disk inspection device. SOLUTION: In this disk transfer device, when motive power of a rotary solenoid 18 is applied to a movable plate 34 through a first link 36, the movable plate 34 is moved forth or back in a first direction. When motive power of second rotary solenoids 54, 56 is applied to gripper arm 40, 42 through second links, the gripper arms 40, 42 are opened or closed in a second direction.

公开(公告)号：JP2000317758A

公开(公告)日：2000-11-21

申请号：JP12851399

申请日：1999-05-10

Applicant: KUBOTA KK

Inventor： TERAO MOTOHIRO ,  HAMADA AKIO ,  FUKUTAKE YASUYUKI ,  ODAWA MASAHIRO

IPC: B23Q3/06 ,  B23Q3/08 ,  G11B17/028

Abstract: PROBLEM TO BE SOLVED: To enable a disc to be aligned with a simple constitution. SOLUTION: By placing a disc 14 on a disc receiver 24, an elastic body 52 is interposed between an aligning member 26 and the inner circumferential surface of a disc hole 14a, the lower surface of the disc 14 is communicated with an air hole 40 and the lower surface of the aligning member 26 is communicated with an air hole 36. When fixing the disc 14, when negative pressure is applied to air hole 36 and 40, the disc 14 is sucked to a disc bearing surface 38, the aligning member 26 is displaced downward with respect to the elastic body 52, and the elastic body 52 is compressed by a pressing surface 54 to abut against the inner circumferential surface of the disc hole 14a, or the disc 14 is aligned.

公开(公告)号：JPH08247394A

公开(公告)日：1996-09-27

申请号：JP5025395

申请日：1995-03-10

Applicant: KUBOTA KK

Inventor： SHIMADA YOSHIAKI ,  KIMURA ICHIJI ,  KIMURA TAKASHI ,  YOSHIGAMI YOSHIAKI ,  NAKAMURA YUKIHIRO ,  ODAWA MASAHIRO

IPC: F17C5/02 ,  F17C5/06 ,  F17C13/04 ,  F17C13/12

Abstract: PURPOSE: To provide an explosionproof type air control device which can simply carry out the drive control of various kinds of actuators through an electric signal. CONSTITUTION: A constant angle rotating device 29 is rotated by a constant angle through an air sensor 36 and an air amplifier 37 by applying a pulse signal to the coil of a voice coil motor 35. High pressure gas is filled in a cylinder by changing over each of pneumatic operation type change-over valves 19-interposed in the driving air circuit of each of actuators 7-16 at each stopping position of the constant angle rotating device according to the contents of the program of the constant angle rotating device 29.

公开(公告)号：JPH0875095A

公开(公告)日：1996-03-19

申请号：JP21542094

申请日：1994-09-09

Applicant: KUBOTA KK

Inventor： SHIMADA YOSHIAKI ,  KIMURA ICHIJI ,  KIMURA TAKASHI ,  YOSHIGAMI YOSHIAKI ,  NAKAMURA YUKIHIRO ,  ODAWA MASAHIRO

IPC: F17C5/02

Abstract: PURPOSE: To process charging faster than in the past by positioning a cylinder so as to direct a vessel valve in a stipulated direction corresponding to a charge valve position in a charge station in a carry in line, and carrying in the positioned cylinder to the charge station charged. CONSTITUTION: A charge valve of a charger on a rotary table is installed toward outside the rotary table, and in an orienteering station, a motor 15 is operated until a charge port 20 of a vessel valve 16 faces an upper side of a conveying direction (direction of arrow mark G). In the vessel valve 16, since height of the charge port 20 is different from a safety valve, this height difference is discriminated in an image processor 18, and a direction of the charge port 20 can be confirmed. When correcting a position of a cylinder 1 in an orienteering station is completed, holding by rollers 13a to 13d is released, to carry in the cylinder to an automatic inserting station automatically inserted to the charger in a charge station.

公开(公告)号：JP2002343761A

公开(公告)日：2002-11-29

申请号：JP2001146372

申请日：2001-05-16

Applicant: KUBOTA KK

Inventor： MAEDA MAKOTO ,  ODAWA MASAHIRO ,  YAO MASAYUKI ,  INOUE NAOKI ,  KANDA MASAYUKI ,  HAYAKAWA YOSHITO ,  KUBOTA MASAMI ,  HARA HIRONORI

IPC: B08B5/00 ,  B08B7/00 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To reliably remove foreign objects, to improve the rate of foreign object removal, to prevent the foreign objects from adhering onto a substrate surface again, and to prevent an extremely small amount of scattering. SOLUTION: Compressed fluid is jetted to the outer edge of a spot P from first and second jet ports 38a and 40a of a nozzle 36, and is sprayed at a spraying angle α being smaller than 90 degrees. Each compressed fluid flows within the range of the spot P, and collides one another near the center between the first and second jet ports 38a and 40a. In addition, the compressed fluid that flows within the range of the spot P gives kinetic energy to foreign objects for supporting the peeling/floating of the foreign objects due to laser irradiation. Then, the foreign objects including extremely small ones that are subjected to the peeling/floating swim with the current of the compressed fluid. A suction port 42a is arranged ahead the flow of the compressed fluid that has collided, thus sucking the foreign objects to the suction port 42a with the compressed fluid by allowing suction force to operate.

公开(公告)号：JP2000343465A

公开(公告)日：2000-12-12

申请号：JP15345599

申请日：1999-06-01

Applicant: KUBOTA KK

Inventor： ODAWA MASAHIRO ,  TERAO MOTOHIRO ,  HAMADA AKIO ,  FUKUTAKE YASUYUKI

IPC: B25J9/16

Abstract: PROBLEM TO BE SOLVED: To accurately measure weight of a work without providing a special station by measuring weight of the work using a high resolution load cell provided in a main body, and to sort the work by weight by changing a place where the work is conveyed with corresponding to a measured weight. SOLUTION: A computer provided in a main body 16 controls a robot system to move an arm 20 to a storage space for a work and make the arm 20 hold the work. Weight of the held work is measured by a high resolution load cell 18. The computer captures weight data from the load cell 18 and determines a place where the work is conveyed according to the weight of the work. Namely, the work is conveyed to a normal position when the weight is within a specified range and to an eject position when the weight is out of the specified range.

公开(公告)号：JP2000343359A

公开(公告)日：2000-12-12

申请号：JP15345499

申请日：1999-06-01

Applicant: KUBOTA KK

Inventor： FUKUTAKE YASUYUKI ,  HAMADA AKIO ,  TERAO MOTOHIRO ,  ODAWA MASAHIRO

IPC: B23Q3/06 ,  G11B5/84

Abstract: PROBLEM TO BE SOLVED: To prevent scattering of dust and play in drive parts. SOLUTION: A movable plate 28 is disposed over a baseplate 14 via a translatory guide 16 so as to be moved in a first direction by a motor 30. The movable plate 28 has, over its center, an opening/closing plate 46 disposed via a second translatory guide 44, and over its front end, two gripper arms 50 and 52 disposed via a third translatory guide 48. Forward movement of the opening/closing plate 46 by an electromagnetic solenoid 54 forces gripper rollers 56 and 58 on the movable plate 28 into acting on oblique lines 50c and 52c of the gripper arms 50 and 52 or opening the gripper arms 50 and 52.