公开(公告)号：US20120126138A1

公开(公告)日：2012-05-24

申请号：US13300032

申请日：2011-11-18

Applicant: Kimitaka OZAWA

Inventor： Kimitaka OZAWA

IPC: H01J3/26

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/304 ,  H01J2237/043 ,  H01J2237/24514

Abstract: The drawing apparatus of the present inventions includes a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among a plurality of charged particle beams, and configured to detect an intensity of a charged particle beam incident thereon. A controller is configured to perform a control of a position of the detector and a control of a blanking deflector array such that one of two adjacent charged particle beams is in a blanking state and the other is in a non-blanking state on the detector that is moved, and each of the plurality of charged particle beams becomes in a blanking state and a non-blanking state sequentially, to cause the detector to perform an output in parallel with the control, and to inspect a defect in each blanking deflector in the blanking deflector array based on the output.

Abstract translation: 本发明的绘图装置包括检测器，该检测器具有这样的尺寸，检测器可以同时检测多个带电粒子束中的两个相邻的带电粒子束，并且被配置为检测入射在其上的带电粒子束的强度。 控制器被配置为执行检测器的位置的控制和对消隐偏转器阵列的控制，使得两个相邻的带电粒子束中的一个处于消隐状态，另一个在检测器上处于非消隐状态， 多个带电粒子束中的每一个顺序地处于消隐状态和非消隐状态，以使检测器与控制并行地执行输出，并且检查在每个消隐偏转器中的缺陷 基于输出的消隐偏转器阵列。