公开(公告)号：US20220252636A1

公开(公告)日：2022-08-11

申请号：US17591092

申请日：2022-02-02

Applicant: Kionix, Inc.

Inventor： Wenting GU ,  Andrew HOCKING ,  Nicole KERNESS

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: A sensor having a proximal end and a distal end includes an anchor, a proof mass, a fixed finger, and a movable finger. The anchor is disposed at the proximal end. The proof mass is coupled to the anchor and disposed at a first distance from the anchor. The fixed finger and the movable finger are coupled to the anchor and disposed at a second distance from the anchor at the distal end. The fixed and movable fingers are configured to measure a first capacitance area. A ratio of the first distance over the second distance is between about 0.2 to about 0.6. The ratio is configured to deflect the movable finger at least about 1 μm relative to the fixed finger.

公开(公告)号：US20210027965A1

公开(公告)日：2021-01-28

申请号：US16521682

申请日：2019-07-25

Applicant: Kionix, Inc.

Inventor： Scott A. MILLER ,  Nicole KERNESS ,  Randy PHILLIPS ,  Sangtae PARK ,  Martin HELLER ,  Mizuho OKADA ,  Andrew HOCKING ,  Wenting GU

IPC: H01H59/00 ,  B81B3/00

Abstract: A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.