公开(公告)号：US20210027965A1

公开(公告)日：2021-01-28

申请号：US16521682

申请日：2019-07-25

Applicant: Kionix, Inc.

Inventor： Scott A. MILLER ,  Nicole KERNESS ,  Randy PHILLIPS ,  Sangtae PARK ,  Martin HELLER ,  Mizuho OKADA ,  Andrew HOCKING ,  Wenting GU

IPC: H01H59/00 ,  B81B3/00

Abstract: A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.