公开(公告)号：WO2011159725A2

公开(公告)日：2011-12-22

申请号：PCT/US2011/040389

申请日：2011-06-14

Applicant: KLA-TENCOR CORPORATION ,  HILL, Andrew V. ,  MANASSEN, Amnon ,  KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SELIGSON, Joel ,  SVIZHER, Alexander ,  WANG, David Y. ,  ROTTER, Lawrence D. ,  DE VEER, Johannes D.

Inventor： HILL, Andrew V. ,  MANASSEN, Amnon ,  KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SELIGSON, Joel ,  SVIZHER, Alexander ,  WANG, David Y. ,  ROTTER, Lawrence D. ,  DE VEER, Johannes D.

IPC: H01L21/027 ,  H01L21/66

CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

Abstract: Systems and methods for discrete polarization scatterometry are provided.

Abstract translation: 提供了离散极化散射法的系统和方法。

公开(公告)号：WO2014130829A1

公开(公告)日：2014-08-28

申请号：PCT/US2014/017723

申请日：2014-02-21

Applicant: KLA-TENCOR CORPORATION

Inventor： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC: H01L21/66

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：WO2011008478A3

公开(公告)日：2011-01-20

申请号：PCT/US2010/040063

申请日：2010-06-25

Applicant: KLA-TENCOR CORPORATION ,  ROTTER, Lawrence D. ,  WANG, David Y. ,  SHAUGHNESSY, Derrick ,  SENKO, Mark

Inventor： ROTTER, Lawrence D. ,  WANG, David Y. ,  SHAUGHNESSY, Derrick ,  SENKO, Mark

IPC: G01N25/72 ,  G01N21/63 ,  H01L21/66

Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.

公开(公告)号：WO2015039031A1

公开(公告)日：2015-03-19

申请号：PCT/US2014/055666

申请日：2014-09-15

Applicant: KLA-TENCOR CORPORATION

Inventor： WANG, David Y. ,  FLOCK, Klaus ,  ROTTER, Lawrence D. ,  KRISHNAN, Shankar ,  DE VEER, Johannes D. ,  FILIP, Catalin ,  BRADY, Gregory ,  ARAIN, Muzammil ,  SHCHEGROV, Andrei

IPC: H01L21/66

CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01N21/8806 ,  G01N21/9501 ,  H01L22/12

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：WO2013066899A1

公开(公告)日：2013-05-10

申请号：PCT/US2012/062624

申请日：2012-10-30

Applicant: KLA-TENCOR CORPORATION

Inventor： ZHUANG, Guorong Vera ,  KRISHNAN, Shankar ,  DE VEER, Johannes D. ,  FLOCK, Klaus ,  WANG, David Y. ,  ROTTER, Lawrence D.

IPC: G01N21/01 ,  G01N21/88

CPC classification number: G01J3/0264 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0278 ,  G01J3/06 ,  G01J3/10 ,  G01N21/4785

Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

Abstract translation: 本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中 照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

公开(公告)号：EP3047520B1

公开(公告)日：2019-11-06

申请号：EP14843577.9

申请日：2014-09-15

Applicant: Kla-Tencor Corporation

Inventor： WANG, David Y. ,  FLOCK, Klaus ,  ROTTER, Lawrence D. ,  KRISHNAN, Shankar ,  DE VEER, Johannes D. ,  FILIP, Catalin ,  BRADY, Gregory ,  ARAIN, Muzammil ,  SHCHEGROV, Andrei

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/95 ,  G01B11/00 ,  G01N21/21 ,  G01B11/06

公开(公告)号：EP2959503A1

公开(公告)日：2015-12-30

申请号：EP14753960.5

申请日：2014-02-21

Applicant: Kla-Tencor Corporation

Inventor： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC: H01L21/66

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：EP3624174A2

公开(公告)日：2020-03-18

申请号：EP19207085.2

申请日：2014-09-15

Applicant: Kla-Tencor Corporation

Inventor： WANG, David Y. ,  FLOCK, Klaus ,  ROTTER, Lawrence D. ,  KRISHNAN, Shankar ,  DE VEER, Johannes D. ,  FILIP, Catalin ,  BRADY, Gregory ,  ARAIN, Muzammil ,  SHCHEGROV, Andrei

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/95 ,  G01B11/00 ,  G01N21/21 ,  G01B11/06

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

公开(公告)号：EP2583300B1

公开(公告)日：2018-05-23

申请号：EP11796320.7

申请日：2011-06-14

Applicant: KLA-Tencor Corporation

Inventor： HILL, Andrew V. ,  MANASSEN, Amnon ,  KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SELIGSON, Joel ,  SVIZHER, Alexander ,  WANG, David Y. ,  ROTTER, Lawrence D. ,  DE VEER, Johannes D.

IPC: G01N21/47 ,  G03F7/20 ,  G02B27/14

CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

Abstract: Systems and methods for discrete polarization scatterometry are provided.

公开(公告)号：EP2583300A2

公开(公告)日：2013-04-24

申请号：EP11796320.7

申请日：2011-06-14

Applicant: KLA-Tencor Corporation

Inventor： HILL, Andrew V. ,  MANASSEN, Amnon ,  KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SELIGSON, Joel ,  SVIZHER, Alexander ,  WANG, David Y. ,  ROTTER, Lawrence D. ,  DE VEER, Johannes D.

IPC: H01L21/027 ,  H01L21/66

CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

Abstract: Systems and methods for discrete polarization scatterometry are provided. One embodiment relates to an optical subsystem of a scatterometer. The optical subsystem includes one or more light sources configured to produce light having different polarizations. The optical subsystem also includes a polarizing beam splitter configured to separate the light into two different light beams having orthogonal and mutually exclusive polarizations. The optical subsystem further includes one or more second optical elements configured to control which one of the two different light beams illuminates the wafer during measurements. The optical subsystem also includes a detection subsystem configured to separately detect two different scattered light beams resulting from illumination of the wafer. The two different scattered light beams have orthogonal and mutually exclusive polarizations. All optical surfaces of the optical subsystem used for the measurements are stationary during the measurements.