APPARATUS OF ELECTRON CYCLOTRON RESONANCE ION SOURCE AND MANUFACTURING METHOD THEREOF
    3.
    发明公开
    APPARATUS OF ELECTRON CYCLOTRON RESONANCE ION SOURCE AND MANUFACTURING METHOD THEREOF 审中-公开
    VORRICHTUNG EINER ELEKTRONENCYCLOTRONRESONANZ-IONENQUELLE UND HERSTELLUNGSVERFAHRENDAFÜR

    公开(公告)号:EP2357658A2

    公开(公告)日:2011-08-17

    申请号:EP09827695.9

    申请日:2009-11-16

    Abstract: An apparatus of an electron cyclotron resonance ion source may include: a magnet unit containing a magnet for generating magnetic fields; an ionizing chamber housing unit for generating ions through electron cyclotron resonance from a plasma; a microwave generating unit for injecting microwaves to the ionizing chamber housing unit to generate ions; and a beam integrating and guiding unit for treating the generated ions. The magnet unit may include: a bobbin for winding the magnet; a variable spacer for dividing the bobbin into a plurality of sections; and the magnet which is wound into the form of a wire or a tape in the plurality of sections formed by the variable spacer.

    Abstract translation: 电子回旋共振离子源的装置可以包括:包含用于产生磁场的磁体的磁体单元; 电离室容纳单元,用于通过来自等离子体的电子回旋共振产生离子; 微波产生单元,用于将微波注入到电离室容纳单元中以产生离子; 以及用于处理所产生的离子的光束积分和引导单元。 磁体单元可以包括:用于卷绕磁体的线轴; 用于将所述筒管分成多个部分的可变间隔件; 以及在由可变间隔件形成的多个部分中缠绕成线或带的形式的磁体。

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