公开(公告)号：SG11202111579YA

公开(公告)日：2021-11-29

申请号：SG11202111579Y

申请日：2020-04-27

Applicant: MKS INSTR INC ,  LAM RES CORP

Inventor： RADOMSKI AARON T ,  GITLIN BENJAMIN J ,  FISK LARRY J ,  OLDZIEJ MARIUSZ ,  BURRY AARON M ,  SMYKA JONATHAN W ,  MARAKHTANOV ALEXEI ,  JI BING ,  KOZAKEVICH FELIX LEIB ,  HOLLAND JOHN ,  BHOWMICK RANADEEP

IPC: H01J37/32

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

公开(公告)号：SG10201403735PA

公开(公告)日：2015-02-27

申请号：SG10201403735P

申请日：2014-06-30

Applicant: LAM RES CORP

Inventor： BHOWMICK RANADEEP ,  HUDSON ERIC A