公开(公告)号：WO0175934A3

公开(公告)日：2002-05-02

申请号：PCT/US0108667

申请日：2001-03-16

Applicant: LAM RES CORP ,  TUQIANG NI ,  NGO TUAN ,  HUANG CHUNG HO ,  LIU ANDREW ,  KAVEH FARRO

Inventor： TUQIANG NI ,  NGO TUAN ,  HUANG CHUNG-HO ,  LIU ANDREW ,  KAVEH FARRO

IPC: G01N23/20 ,  H01J37/32

CPC classification number: H01J37/32935 ,  G01N23/20 ,  H01J37/32972

Abstract: A process chamber with a computer system that controls the process chamber is connected to one or more spectrometers. The spectrometers may be part of an interferometer or may be an optical emission spectrometer. The spectrometers may be CCD or photodiode arrays of 2,048 elements. An input board forms part of the computer system and is directly connected to the spectrometers. The input board provides data from the spectrometers to dual port memory, which is directly accessible to the CPU of the computer system. The use of a state machine and adder on the input board allows computation and placement of the data from the spectrometers on to the dual port memory, so that the CPU is not needed for such placement.

Abstract translation: 具有控制处理室的计算机系统的处理室连接到一个或多个光谱仪。 光谱仪可以是干涉仪的一部分，也可以是光发射光谱仪。 光谱仪可以是2,048个元件的CCD或光电二极管阵列。 输入板构成计算机系统的一部分，并直接连接到光谱仪。 输入板将数据从光谱仪提供给双端口存储器，可直接访问计算机系统的CPU。 在输入板上使用状态机和加法器允许将数据从光谱仪计算和放置到双端口存储器，以便CPU不需要这样的放置。

公开(公告)号：AU5292701A

公开(公告)日：2001-10-15

申请号：AU5292701

申请日：2001-03-16

Applicant: LAM RES CORP

Inventor： TUQIANG NI ,  NGO TUAN ,  HUANG CHUNG-HO ,  LIU ANDREW ,  KAVEH FARRO

IPC: G01N23/20 ,  H01J37/32 ,  H01J49/00

Abstract: A process chamber with a computer system that controls the process chamber is connected to one or more spectrometers. The spectrometers may be part of an interferometer or may be an optical emission spectrometer. The spectrometers may be CCD or photodiode arrays of 2,048 elements. An input board forms part of the computer system and is directly connected to the spectrometers. The input board provides data from the spectrometers to dual port memory, which is directly accessible to the CPU of the computer system. The use of a state machine and adder on the input board allows computation and placement of the data from the spectrometers on to the dual port memory, so that the CPU is not needed for such placement.