公开(公告)号：WO2007038054A3

公开(公告)日：2007-05-31

申请号：PCT/US2006036323

申请日：2006-09-15

Applicant: LAM RES CORP ,  YOON HYUNGSUK ALEXANDER ,  KIM YUNSANG ,  RYDER JASON A ,  BAILEY III ANDREW D

Inventor： YOON HYUNGSUK ALEXANDER ,  KIM YUNSANG ,  RYDER JASON A ,  BAILEY III ANDREW D

IPC: H01L21/203 ,  H01L21/461

CPC classification number: H01L21/02087 ,  H01J37/32541 ,  H01J37/3255 ,  H05H1/2406 ,  H05H2001/2412

Abstract: An apparatus generating a plasma for removing an edge polymer from a substrate is disclosed. The embodiment includes a powered electrode assembly, including a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The embodiment also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated, the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, the cavity having an outlet at one end for providing the plasma to remove the edge polymer.

Abstract translation: 公开了一种产生等离子体以从衬底去除边缘聚合物的设备。 该实施例包括供电电极组件，该供电电极组件包括供电电极，第一介电层以及设置在供电电极和第一介电层之间的第一金属丝网。 该实施例还包括与电源电极组件相对设置的接地电极组件，以便形成产生等离子体的空腔，当等离子体存在于空腔中时，第一电介质层被等离子体与等离子体屏蔽， 腔在一端具有出口以提供等离子体以去除边缘聚合物。

公开(公告)号：MY149595A

公开(公告)日：2013-09-13

申请号：MYPI20084358

申请日：2007-05-04

Applicant: LAM RES CORP

Inventor： YOON HYUNGSUK ALEXANDER ,  BAILEY ANDREW D III ,  RYDER JASON A ,  WILCOXSON MARK H ,  GASPARITSCH JEFFREY G ,  JOHNSON RANDY ,  HOFFMANN STEPHAN P

IPC: B08B7/00

Abstract: AN APPARATUS, SYSTEM AND METHOD FOR CLEANING A SUBSTRATE EDGE (101) INCLUDE A BRISTLE BRUSH UNIT (200) THAT CLEANS BEVEL POLYMERS (103) DEPOSITED ON SUBSTRATE EDGES USING FRICTIONAL CONTACT IN THE PRESENCE OF CLEANING CHEMISTRY. THE BRISTLE BRUSH UNIT IS MADE UP OF A PLURALITY OF OUTWARDLY EXTENDING VANES (201) AND IS MOUNTED ON A ROTATING SHAFT (202). AN ABRASIVE MATERIAL IS DISTRIBUTED THROUGHOUT AND WITHIN THE OUTWARDLY EXTENDING VANES OF THE BRISTLE BRUSH UNIT TO PROVIDE THE FRICTIONAL CONTACT. THE BRISTLE BRUSH UNIT CLEANS THE EDGE OF THE SUBSTRATE BY ALLOWING FRICTIONAL CONTACT OF THE PLURALITY OF ABRASIVE PARTICLES WITH THE EDGE OF THE SUBSTRATE IN THE PRESENCE OF FLUIDS, SUCH AS CLEANING CHEMISTRY, TO CUT, RIP AND TEAR THE BEVEL POLYMER FROM THE EDGE OF THE SUBSTRATE.