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    AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT
    1.
    发明申请
    AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT 审中-公开
    自动动态基线的创建和调整

    公开(公告)号：WO2008042578A3

    公开(公告)日：2008-06-19

    申请号：PCT/US2007078574

    申请日：2007-09-14

    Applicant: LAM RES CORP ,  HUANG CHUNG-HO ,  SETO JACKIE ,  BRIGHT NICOLAS

    Inventor： HUANG CHUNG-HO ,  SETO JACKIE ,  BRIGHT NICOLAS

    IPC: H01L21/00

    CPC classification number: H01J37/3299 ,  H01J37/32935

    Abstract: In a plasma processing system., a method for dynamically establishing a baseline is provided. The method includes processing a first substrate The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline The method moreover includes including the first signal data in a recalculation of the baseline if the fust signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.

    Abstract translation: 在等离子体处理系统中，提供了用于动态建立基线的方法。 该方法包括处理第一衬底。该方法还包括收集第一衬底的第一信号数据。 该方法还包括将第一信号数据与基线进行比较。该方法还包括如果第四信号数据处于置于基线以上的最高电平和第二信号数据之间的置信水平范围内的基线的重新计算中， 底线以下的底部水平。

    AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT
    2.
    发明申请
    AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT 审中-公开
    自动动态基线创建和调整

    公开(公告)号：WO2008042578B1

    公开(公告)日：2008-08-07

    申请号：PCT/US2007078574

    申请日：2007-09-14

    Applicant: LAM RES CORP ,  HUANG CHUNG-HO ,  SETO JACKIE ,  BRIGHT NICOLAS

    Inventor： HUANG CHUNG-HO ,  SETO JACKIE ,  BRIGHT NICOLAS

    IPC: H01L21/00

    CPC classification number: H01J37/3299 ,  H01J37/32935

    Abstract: In a plasma processing system., a method for dynamically establishing a baseline is provided. The method includes processing a first substrate The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline The method moreover includes including the first signal data in a recalculation of the baseline if the fust signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.

    Abstract translation: 在等离子体处理系统中，提供了用于动态建立基线的方法。 该方法包括处理第一衬底。该方法还包括收集第一衬底的第一信号数据。 该方法还包括将第一信号数据与基线进行比较。此外，该方法还包括在第一信号数据重新计算基线时，如果峰值信号数据在置信水平范围内，置信水平范围在基线之上， 底线低于基线。

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